CO2气体分析用中波红外窄带滤光片的研制*

doi:10.13385/j.cnki.vacuum.2026.01.02

真空 ›› 2026, Vol. 63 ›› Issue (1): 9-14.doi: 10.13385/j.cnki.vacuum.2026.01.02

CO₂气体分析用中波红外窄带滤光片的研制^*

于志强, 王忠连, 任少鹏, 娄海宇, 林晓敏, 黎冰, 刘伟航, 杨兆祥, 程佳祥

沈阳仪表科学研究院有限公司,辽宁沈阳 110043

收稿日期:2025-03-04 出版日期:2026-01-25 发布日期:2026-02-02
作者简介:于志强（1997-）,男,吉林省四平市人,工程师,硕士。
基金资助:
^*中国机械工业集团有限公司青年科技基金项目（QNJJ-PY-2023-09）; 沈阳市中青年科技创新人才培育专项（RC230252）

Development of Medium Wave Infrared Narrowband Filter for CO₂ Gas Analysis

YU Zhiqiang, WANG Zhonglian, REN Shaopeng, LOU Haiyu, LIN Xiaomin, LI Bing, LIU Weihang, YANG Zhaoxiang, CHENG Jiaxiang

Shenyang Academy of Science Co., Ltd., Shenyang 110043, China

Received:2025-03-04 Online:2026-01-25 Published:2026-02-02

摘要/Abstract

摘要： 为提升中波红外CO₂气体检测的精度与灵敏度,研制了一种高性能中波红外窄带滤光片。采用蓝宝石作为基底材料,选用Ge与ZnS材料构建膜层,通过等效导纳匹配设计方法优化了膜系结构。同时,引入了敏感层拆分控制技术和比例因子差分控制薄膜厚度,有效解决了红外波段高精度控制难题。测试结果表明：最终产品的中心波长为4 269 nm,峰值透射率为89.7%,通带半宽度为126 nm,2~15 μm平均截止深度达到OD2.83,该红外窄带滤光片能够有效提升气体的探测精度,为气体探测技术的进步提供了有力支撑。

关键词: 光学薄膜, 中波红外, 窄带滤光片, CO₂, 气体探测器

Abstract: ： To improve the precision and sensitivity of CO₂ gas detection in the mid-wave infrared, a high-performance mid-wave infrared narrowband filter was developed. The blue sapphire was used as the substrate material, and Ge and ZnS materials were used to construct the film layer. The film system structure was optimized by the equivalent impedance matching design method. At the same time, the sensitive layer segmentation control technology and the proportional factor differential control of the film thickness were introduced to effectively solve the high-precision control problem in the infrared waveband. The test results show that the final product has a center wavelength of 4 269 nm, a peak transmission rate of 89.7%, a passband half-width of 126 nm, and an average cutoff depth of OD2.83 from 2-15 μm. The as-developed infrared narrowband filter can effectively improve the detection accuracy of gases and provide strong support for the progress of gas detection technology.

Key words: optical thin film, medium wave infrared, narrowband filter, CO₂, gas detector

中图分类号: O484

于志强, 王忠连, 任少鹏, 娄海宇, 林晓敏, 黎冰, 刘伟航, 杨兆祥, 程佳祥. CO₂气体分析用中波红外窄带滤光片的研制^*[J]. 真空, 2026, 63(1): 9-14.

YU Zhiqiang, WANG Zhonglian, REN Shaopeng, LOU Haiyu, LIN Xiaomin, LI Bing, LIU Weihang, YANG Zhaoxiang, CHENG Jiaxiang. Development of Medium Wave Infrared Narrowband Filter for CO₂ Gas Analysis[J]. VACUUM, 2026, 63(1): 9-14.

参考文献

[1] 沈英,邵昆明,吴靖,等.气体光学检测技术及其应用研究进展[J]. 光电工程,2020,47(4):3-18.
[2] 刘崎,汪磊,朱向冰,等.基于非分散红外法的二氧化碳浓度检测综述[J]. 红外,2022,43(7):1-7.
[3] 周晟,王凯旋,刘定权,等.3.2~3.8 μm和4.9~5.4 μm红外双色滤光片的研制[J]. 中国光学,2021,14(3):536-543.
[4] XU M L, PENG B, ZHU X Y, et al.Multi-gas detection system based on non-dispersive infrared (NDIR) spectral technology[J]. Sensors, 2022, 22(3): 836.
[5] YU K, YANG X P, WANG Y J, et al.A temperature-compensated CO₂ detection system based on non-dispersive infrared spectral technology[J]. Review of Scientific Instruments, 2024, 95(8): 085002.
[6] INOUE T, DE ZOYSA M, ASANO T, et al.Filter-free nondispersive infrared sensing using narrow-bandwidth mid-infrared thermal emitters[J]. Applied Physics Express, 2013, 7(1): 012103.
[7] KISCHKAT J, PETERS S, GRUSKA B, et al.Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride[J]. Applied Optics, 2012, 51(28): 6789-6798.
[8] TIEN C L, CHEN K P, LIN H Y.Internal stress prediction and measurement of mid-infrared multilayer thin films[J]. Materials, 2021, 14(5): 1101.
[9] 定翔,马雪然,张杨,等.麻醉气体的红外吸收光谱等效模拟方法[J]. 计量学报,2023,44(10):1626-1630.
[10] HUANG X J, WANG Z Z, ZHAO J K, et al.Miniature diffusive mid-infrared photoacoustic gas sensor for carbon dioxide detection[J]. Infrared Physics & Technology, 2024, 137: 105217.
[11] MENG J J, BALENDHRAN S, SABRI Y, et al.Smart mid-infrared metasurface microspectrometer gas sensing system[J]. Microsystems & Nanoengineering, 2024, 10: 74.
[12] 王海洋,明景谦,贾星蕊,等.中波红外宽波段多光谱成像光学系统设计[J]. 红外技术,2022,44(10):1059-1065.
[13] 蔡渊,刘定权,罗海瀚. 3.5~4.0 μm低温光谱带通滤光片的设计与研制[J]. 中国激光,2012,39(1):158-162.
[14] WANG S D, HUA M H, WANG B Y, et al.Design and implementation of a miniaturized photoacoustic spectroscopy CO₂ sensor[J]. IEEE Transactions on Instrumentation and Measurement, 2024, 73: 7503709.
[15] 付秀华,张天翔,熊仕富,等.中红外抗CO₂气体辐射负滤光片的研制(特邀)[J]. 光子学报,2022,51(9):50-58.
[16] 尚鹏,陈蓓曦,孙鹏,等.高性能中波红外陷波滤光片设计与研制[J]. 中国光学(中英文),2023,16(4):904-915.
[17] SHEN F, KANG Q L, WANG J J, et al.Dielectric metasurface-based high-efficiency mid-infrared optical filter[J]. Nanomaterials, 2018, 8(11):938.
[18] JHA R K.Non-dispersive infrared gas sensing technology: a review[J]. IEEE Sensors Journal, 2021, 22(1): 6-15.
[19] PAN Y Q, LIU H, ZHENG Z P.Design and fabrication of optical filters for infrared imaging temperature measurement[J]. Optik, 2021, 247:167994.
[20] 周书铨,王勤,司承才,等.红外光纤与1~3 μm HgCdTe红外探测器组合[J]. 红外与毫米波学报,1996(1):61-65.
[21] 朱泽宇,潘雨婷,吴晗,等.中波红外减反射硬质薄膜研究进展(特邀)[J]. 光子学报,2022,51(9):71-87.
[22] 张建付,杨崇民,刘青龙,等.中波红外3 μm~5 μm宽带通滤光片的研制[J]. 应用光学,2013,34(4):695-699.
[23] TAN X C, ZHANG H, LI J Y, et al.Non-dispersive infrared multi-gas sensing via nanoantenna integrated narrowband detectors[J]. Nature Communications, 2020, 11: 5245.
[24] NEUMANN N, EBERMANN M, KURTH S, et al.Tunable infrared detector with integrated micromachined Fabry-Perot filter[J]. Journal of Micro/Nanolithography, MEMS and MOEMS, 2008, 7(2): 021004.
[25] ZHAO Y M, ZHANG C C, CI G T, et al.Development of high-precision NO₂ gas sensor based on non-dispersive infrared technology[J]. Sensors, 2024, 24(13): 4146.
[26] CONSANI C, BARLIER N, STOCKER G, et al.Monolithic CMOS-compatible CO₂ sensor with thermal source and detector[C]//2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). Kyoto, Japan: IEEE, 2023: 1453-1456.
[27] 中国机械工业联合会. 光学和光子学光学薄膜第3部分: 环境适应性: GB/T 26332.3—2015 [S]. 北京: 中国标准出版社, 2015.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

CO₂气体分析用中波红外窄带滤光片的研制^*

Development of Medium Wave Infrared Narrowband Filter for CO₂ Gas Analysis

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 5

Metrics

本文评价

推荐阅读 10

[1]	熊天农, 高鹏, 王瑞生, 任少鹏, 赵帅锋, 阴晓俊. GB/T 26332《光学和光子学光学薄膜》新增内容解析[J]. 真空, 2024, 61(3): 74-78.
[2]	冯红旗, 李森, 杨润泽, 武越, 孙娟. 适用于极端环境的环控生保热试验设备研制^*[J]. 真空, 2023, 60(5): 86-91.
[3]	任少鹏, 高鹏, 王瑞生, 金秀, 王忠连, 张轶. 《荧光检测分析用干涉滤光片》标准解析[J]. 真空, 2021, 58(4): 25-29.
[4]	高鹏, 班超, 任少鹏, 金秀, 王忠连, 杨文华. 一种基于遗传算法的光学薄膜优化设计方法^*[J]. 真空, 2021, 58(2): 27-30.
[5]	高鹏, 金秀, 任少鹏, 王忠连, 赵帅锋, 阴晓俊. 浅谈国内外光学薄膜技术标准[J]. 真空, 2020, 57(4): 19-23.