真空 ›› 2020, Vol. 57 ›› Issue (6): 1-4.doi: 10.13385/j.cnki.vacuum.2020.06.01
• 薄膜 • 下一篇
刘鲁生, 翟朝峰, 杨兵, 宋昊哲, 于岐, 史丹, 袁子尧, 卢志刚, 陈滨, 周美琪, 李海宁, 喻彪, 黄楠, 姜辛
LIU Lu-sheng, ZHAI Zhao-feng, YANG Bing, SONG Hao-zhe, YU Qi, SHI Dan, YUAN Zi-yao, LU Zhi-gang, CHEN Bin, ZHOU Mei-qi, LI Hai-ning, YU Biao, HUANG Nan, JIANG Xin
摘要: 根据目前热丝化学气相沉积(Hot Filament Chemical Vapour Deposition, HFCVD )金刚石薄膜制备设备现状:存在热丝多为水平放置碳化变脆后易发生断裂、不能实现CVD金刚石薄膜的连续制备、生产成本高及制备效率低等缺点,依据热丝化学气相沉积法制备金刚石薄膜的原理,应用Solidework三维设计软件进行三维建模,结合机械设计软件制图,研制出了该型金刚石薄膜连续制备HFCVD设备,并给出了连续镀膜的工艺流程,采用该设备成功批量生长出质量良好的金刚石薄膜。
中图分类号:
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