磁控溅射制备不锈钢基耐蚀导电薄膜研究进展

doi:10.13385/j.cnki.vacuum.2020.06.03

摘要/Abstract

摘要： 不锈钢基耐腐蚀导电薄膜被广泛应用于燃料电池双极板等器件,要求具有高的耐腐蚀性和导电性、良好的机械性能、加工成本低等特点。然而,目前的不锈钢基薄膜耐腐蚀性和导电性难以兼得,实现这两种性能的合理匹配,降低生产成本,是金属基薄膜商业化的关键环节之一。本文系统总结了磁控溅射制备不锈钢基耐腐蚀导电薄膜的研究进展,并从制备材料种类、工艺参数等方面进行了详细分析。文末还展望了不锈钢基耐腐蚀导电薄膜的发展方向。

关键词: 耐蚀薄膜, 导电薄膜, 不锈钢基

Abstract: Tainless steel-based corrosion-resistant conductive films are widely used in fuel cell bipolar plates and other devices, which require high corrosion resistance and electrical conductivity, good mechanical properties, and low processing costs. However, it is difficult to have both corrosion resistance and electrical conductivity of the current stainless steel-based films. Realizing the reasonable matching of these two properties and reducing production costs are one of the key points in the commercialization of metal-based films. This paper systematically summarizes the research progress in the preparation of stainless steel-based corrosion-resistant conductive films by magnetron sputtering, and analyzes in detail the types of preparation materials and process parameters. At the end of the article, the development direction of stainless steel-based corrosion-resistant conductive film is also prospected.

Key words: corrosion resistant film, conductive film, stainless steel base

中图分类号:

TG179

冯绅绅, 汪亮, 李斌, 余清洲, 干蜀毅. 磁控溅射制备不锈钢基耐蚀导电薄膜研究进展[J]. 真空, 2020, 57(6): 11-17.

FENG Shen-shen, WANG Liang, LI Bin, YU Qing-zhou, GAN Shu-yi. Research Progress of Corrosion-Resistant and Conductive Films on Stainless Steel Substrate Prepared by Magnetron Sputtering[J]. VACUUM, 2020, 57(6): 11-17.

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