真空 ›› 2020, Vol. 57 ›› Issue (1): 31-34.doi: 10.13385/j.cnki.vacuum.2020.01.06
李明亮1, 刘利1, 沈燕2
LI Ming-liang1, LIU Li1, SHEN Yan2
摘要： 在室温条件下,采用磁控溅射技术在玻璃衬底上生长了AZO/Ag/AZO多层透明导电薄膜。主要研究了Ag层厚度对多层透明导电薄膜结构和性能的影响。研究表明,AZO和Ag分别延(002)面和(111)面高度择优生长,随着Ag层厚度的增加,多层透明导电薄膜的电阻率不断降低,透过率呈现先降低再增加最后再降低的变化趋势,其中Ag层厚度为8nm的样品获得最大品质因子33.1×10-3 Ω-1,综合性能最佳。
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