新型同轴电极结构碳纳米管场发射电离计

doi:10.13385/j.cnki.vacuum.2019.06.03

Abstract

Abstract: In this paper, a new type of cold cathode ionization vacuum gauge with carbon nanotube(CNT) field emission cathode is designed. The device consists of a field emission cathode, an anode grid, and an ion collector, with the anode and ion collector coaxial arranged. The carbon nanotubes were grown directly on the metal substrate by chemical vapor deposition, and two types of cathodes with 4mm×5mm rectangle and Φ 0.1mm circular emission surfaces were investigated respectively. The carbon nanotube cathodes presented excellent field emission performance with turn-on electric field of 1.70 V/μm. In the nitrogen environment, the vacuum measurement performance of the gauges based on two kinds of cathodes is investigated respectively, the normalized current (I_i/I_a) range and the pressure show a good linear relationship from 10^-7 to 10^-3 Pa, and the measurement sensitivities of the gauges corresponding to the cathodes of rectangular and circular emission areas are 3.1×10^-2 Pa^-1 and 1.3×10^-2 Pa^-1, respectively.

Key words: carbon nanotube, field emission, ionization gauge, coaxial electrode, sensitivity

CLC Number:

TN304

HE Jian-feng, HUANG Wei-jun, DONG Chang-kun. A New Carbon Nanotube Field Emission Ionization Gauge With Coaxial Electrodes[J].VACUUM, 2019, 56(6): 12-15.

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A New Carbon Nanotube Field Emission Ionization Gauge With Coaxial Electrodes

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