片上电子源的研究现状（一）*

doi:10.13385/j.cnki.vacuum.2019.06.04

VACUUM ›› 2019, Vol. 56 ›› Issue (6): 16-26.doi: 10.13385/j.cnki.vacuum.2019.06.04

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Review on On-Chip Electron Sources

YANG Wei, WEI Xian-long

Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China

Received:2019-09-05 Online:2019-11-25 Published:2019-12-03

Abstract

Abstract: The article reviews and summarizes the research works in last decades and recent development of on-chip electron sources including field emission on-chip electron sources, internal field emission on-chip electron sources and new thermionic on-chip electron sources. The article compares the basic principles, fabrication and working performance of such on-chip electron sources, including working voltage, working vacuum, emission current, emission current density and emission efficiency, and analyzes the advantages and disadvantages of various on-chip electron sources. A brief summary of the development status of on-chip electron source is made through these analyses.

Key words: on-chip electron sources, field emission, internal field emission, thermionic emission

CLC Number:

TN32

YANG Wei, WEI Xian-long. Review on On-Chip Electron Sources[J].VACUUM, 2019, 56(6): 16-26.

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