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VACUUM ›› 2020, Vol. 57 ›› Issue (6): 18-22.doi: 10.13385/j.cnki.vacuum.2020.06.04

• Thin Film • Previous Articles     Next Articles

Design and Coating Technology of Optical Filter for Infrared Thermometry Imaging

GUO Zhi-shuai1, FEI Shu-guo1, 2, YIN Xiao-jun2, GAO Peng2, ZHAO Shuai-feng2, WANG Yin-he2, SONG Guang-hui2   

  1. 1.School of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China;
    2.Shenyang Instrument Science Research Institute Co., Ltd., Shenyang 110043, China
  • Received:2020-06-15 Online:2020-11-25 Published:2020-11-30

Abstract: The infrared temperature measurement of human body, the spectral characteristic parameters of the optical film filter of the imaging system, the film system design and the coating process are studied. According to the black body radiation theory, the infrared radiation spectrum distribution of the human body is calculated, and the filter spectral characteristic parameters are requiredcut-off wavelength 5.5 μm, transmission band 7μm~12μm, average transmittance is greater than 85%, cut-off band UV-5 μm, average cut-off background is greater than OD3. The single crystal silicon wafer is used as the substrate, and germanium and zinc sulfide are used as the coating materials. The filter film system is designed, and the vacuum plating process is proposed.

Key words: infrared temperature measurement, optical filter, thin film layers design, coating process

CLC Number: 

  • O439
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