Abstract: With the development of miniaturization,high density and high reliability of microelectronic packaging, various industries have put forward the requirements of high penetration rate,high quality of brazed joints and high cleanliness of materials for brazing technology. High vacuum brazing technology is becoming more and more popular with accelerating development. Such technology ensures the cleanness of vacuum chamber and welding vacuum degree, and then guarantees the welding quality and service life of components. High vacuum brazing technology requires high vacuum and low pressure rise rate. The outgassing of materials at high temperature is the main gas source in the furnace under high vacuum condition, which directly affects the vacuum holding time. In view of the assembled vacuum brazing furnace, the theoretical research and calculation of the outgassing of the furnace material surface and the pressure rise rate of the furnace body are carried out. The vacuum degree and pressure rise rate that vacuum brazing furnace can achieve are tested. The outgassing characteristics of material surface at high temperature are analyzed in detail. The influence of different temperature on the outgassing of materials is analyzed. A model of out gassing pressure rise rate of materials is established, in order to better guide the design of vacuum brazing furnace.

Key words: high vacuum, pressure rise rate, bake, material bleeding, vacuum brazing