HL-2M装置真空室预抽气系统的研制*

doi:10.13385/j.cnki.vacuum.2021.01.08

Abstract

Abstract: In order to check whether the design, manufacture and assembly of the HL-2M vacuum vessel meet the ultrahigh vacuum requirement, a pumping system was established in the factory to test the vacuum performance of HL-2M vacuum vessel after pre-assembly. Pumping by a primary pumping system with three molecular pump and a cryo-pump, the pressure in the vacuum vessel reaches 3.7×10^-5 Pa after 72 hours, which is better than the expected value. After that, the total leak and outgassing rate is tested by static constant volume method. The result shows that, the total leak rate is 2.3 ×10^-7Pa·m³·s^-1, which is lower than that of HL-2A by two orders of magnitude. The test shows that with reasonable pumping system setting, the ultrahigh vacuum condition of HL-2M is achieved, which will provide a favorable condition for its future plasma operation.

Key words: ultra high vacuum, leak rate, conductance, effective pumping speed

CLC Number:

TL62+8

CAI Xiao, CAO Zeng, ZHANG Wei, LI Rui-jun, HUANG Yong. Development of Pre-pumping System for Vacuum Chamber of HL-2M[J].VACUUM, 2021, 58(1): 33-37.

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Development of Pre-pumping System for Vacuum Chamber of HL-2M

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