微波表面波对管内壁沉积DLC薄膜的均匀性的研究

doi:10.13385/j.cnki.vacuum.2021.03.08

Abstract

Abstract: This paper reports the study on the uniformity of DLC coating deposited in the inner wall of tubal samples(such as carbon steel, PET bottle, plastic syringe) by microwave surface wave plasma. The main factors affecting the uniformity of as-deposited nanoscale coatings along the antenna direction were explored. By measuring the deposition rates of the coatings at different positions,it can be concluded that the generation and strength of surface wave dominate the uniformity of the DLC coating in the inner wall of tubes. Penning discharge can only affect the discharge characteristics regionally by the enhancement of the discharge, not the discharge model. Therefore, it is impossible to improve the uniformity of the coatings in the tube in whole antenna range.

Key words: microwave surface wave plasma, tubal sample, nano-thickness coating, uniformity

CLC Number:

TB753+.9

ZHOU Mei-li, SHI Chang-yong, CHEN Qing. Study on DLC Coating Uniformity in the Tube Inner Wall Through Microwave Surface Wave Plasma Deposition[J].VACUUM, 2021, 58(3): 39-44.

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Study on DLC Coating Uniformity in the Tube Inner Wall Through Microwave Surface Wave Plasma Deposition

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