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VACUUM ›› 2021, Vol. 58 ›› Issue (1): 67-71.doi: 10.13385/j.cnki.vacuum.2021.01.14

• Thin Film • Previous Articles     Next Articles

Thickness Uniformity of Anti-Seizing Coating for Fasteners Prepared by Magnetron Sputtering

WANG Kun1,2, WANG Shi-qing1, LI Jian2, DAN Min1, CHEN Lun-jiang1   

  1. 1. Southwestern Institute of Physics, Chengdu 610041, China;
    2. Neijiang Normal University, Neijiang 641100, China
  • Received:2020-01-20 Online:2021-01-25 Published:2021-01-26

Abstract: To study the uniformity of the anti-seizing coating on the surface of the nuts and bolts of the supporting devices for the magnetic confinement fusion devices, copper films were prepared on the inner and outer wall of the cylindrical device by magnetron sputtering technology. The thickness of the films was measured by the step meter. A rectangular copper block was used as the magnetron sputtering target. The single rotation and revolution plus rotation were used to deposit copper films. The film thickness distribution on the inner wall and the outer wall of the cylindrical devices was analyzed. The results show that the uniformity of the films prepared by revolution plus rotation is better than that by single rotation. The thickness of the films increases with the decrease of the pore(tube) size.

Key words: magnetron sputtering, nuclear fusion, uniformity, anti-seizing, tube inner wall, tube outer wall

CLC Number: 

  • O539
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