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VACUUM ›› 2020, Vol. 57 ›› Issue (5): 61-65.doi: 10.13385/j.cnki.vacuum.2020.05.13

• Measurement and Control • Previous Articles     Next Articles

Effect of Structure and Material of Narrow-Electrode with Quartz Plate Interlayer on DC Plasma Discharge

ZHANG Tian-yi1, Yang Zhi-hao1, LIU Yun-hui2, MA Yu-tian3, WANG Bo1,2   

  1. 1. College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124,China;
    2. Department of Mechanical Engineering, Zaozhuang Vocational College of Science and Technology, Tengzhou 277599,China;
    3. Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080,China
  • Received:2019-08-20 Published:2020-11-06

Abstract: In this paper, the low-pressure DC discharge process of a narrow-electrode discharge device with quartz plate interlayer was studied. The influence of electrode structure and material on plasma parameters was discussed. The electrode width is 4 mm and the spacing is more than 40 mm. The experiments were carried out by using the double probe needle method. The influence of electrode structure on the electron density distribution and electron temperature of the home-made DC plasma discharge device was analyzed by changing the pressure and discharge power. The results show that the plasma density can be effectively increased by increasing the surface area of the electrode and adopting special electrode structure. It was also found that with the decrease of air pressure, the positive cylinder area decreases gradually, the plasma density changes gently along the direction of electric field, and the DC plasma density of the anode increases gradually. At this time, the uniformity of plasma spatial distribution increases, and the maximum value is obtained at 16Pa.

Key words: plasma, DC discharge, discharge electrode, uniformity, electron density

CLC Number: 

  • U461
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