溶胶-凝胶法制备AZO薄膜的研究进展*

doi:10.13385/j.cnki.vacuum.2021.04.06

Abstract

Abstract: The research progress of sol-gel technology used to prepare AZO film are reviewed. The influence of sol-gel parameters such as aging time,heating processing,quantity of dopant aluminum,kinds of activator and thickness of film on the structure and optical electrical properties of AZO film are discussed and summarized. The advantage and insufficiency of sol-gel technology were pointed out and research direction of future were proposed.

Key words: AZO film, sol-gel, optical and electrical performance

CLC Number:

TB43

JI Jian-chao, YAN Yue, HA En-hua. Study Progress of AZO Films by Sol-gel Methods[J].VACUUM, 2021, 58(4): 30-35.

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Study Progress of AZO Films by Sol-gel Methods

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