Based on the actual situation of the inclined magnetron sputtering with the circular plane target, the mathematical model is established according to the characteristics of the angle between the annular etching groove of the target and the horizontal workpiece table. Matlab software is used to simulate and study the influence of different angle on the film thickness distribution when the target and workpiece table are facing each other and the height is fixed. We found that the film thickness increases first and then decreases in the horizontal distance between the worktable and the target. When the target angle is appropriate, the film deposition rate changesapproximately in a straight line within the fixed area of the worktable. We simulated the uniformity on the 4-inch substrate according to the actual characteristics of thedecreasing distribution of the film thickness in the horizontal plane of the worktable. According to the results of theoretical simulation,tantalum nitride films with nonuniformity less than 0.6% were prepared on a 4-inch substrate, which verified the correctness of the mathematical model. The reason why the experimental results are better thanthat of the simulation is explained. This work provides a reference for the design and manufacture of magnetron sputtering coating equipment.

The measured AES depth profiles of Ni/Cr multilayer with rotational and stationary modes are quantified by convolution and deconvolution methods with the TV-Tikhonov and the genetic algorithms in the framework of the MRI(atomic Mixing-Roughness-Information depth)model. The interfacial roughness values are obtained accordingly and the reconstructed layer structure is well agreed with the HR-TEM measurement.

The four LZ, LZ3Y, LZ7C3 and YSZ thermal barrier coatings (TBCs)were fabricated via electron beam physical vapor deposition (EB-PVD). The high temperature phase stability, interficial bonding strength and cyclic oxidation behavior of three types of rare earth zirconates and YSZ TBCs were investigated. The phase constituent, phase structural stability, morphology and chemical composition of the four TBCs were systematically analyzed by XRD, SEM and EDS. The results indicate that the diffraction peaks belonging to the LZ, LZ3Y and LZ7C3 coating powders, which gradually shift to the larger 2θ-value after long-term thermal exposure at 1300℃. The excessive phases including of La₂O₃, t-ZrO₂ and CeO₂ coexisted in the ceramic coatings also have produced the solid solution phenomenon. The YSZ coating appears two monoclinic diffraction peaks and the intensities of these two peaks slightly increase to a certain extent. After 336h in room temperature air, the LZ coating exhibits lamellar delamination. The averaged interfacial bonding strength of YSZ coating is the highest, while that of LZ coating is the lowest. Meanwhile, the thermal cycling lives of three rare earth zirconates TBCs are lower than that of YSZ coating. It is proably related to the excess of La₂O₃ contained in the three new TBCs. La₂O₃ is easy to chemically react with H₂O or CO₂ in air, which further leads to volume expansion, weakens the inferfacial adhesion between the ceramic coat and bond coat and decreases the thermal cycling lifetime of the coaings.

Aiming at the traditional aluminum production technology, in order to improve the adhesion and barrier property of the film, the RF magnetron sputtering aluminum plating process was adopted to prepare the high barrier layer of pure aluminum by depositing pure aluminum on the surface of PET plastic film. The influences of RF power and sputtering air pressure on film adhesion and barrier property were investigated by changing the parameters of RF power and sputtering air pressure. The results show that the RF power and sputtering pressure in the deposition process have a great influence on the performance of the magnetron sputtered Al film. Under a certain sputtering pressure, the bonding strength of the film layer gradually increases with the increase of the RF power, and the barrier property of the film layer increases with the increase of the RF power, and then decreases. When the RF power is 85W, the minimum oxygen transmittance is 1.11cm³/（m²·day·atm）. Under the condition of the same RF power, the binding force increases first and then decreases with the increase of sputtering air pressure, and the barrier property of the film decreases gradually with the increase of sputtering air pressure. When the sputtering pressure was 0.5Pa, the highest binding force was 1.68N/mm. Compared with the traditional aluminum film, the binding force is increased by 2 times and the barrier property is increased by 5 times.

Interference filters are widely used in fluorescence detection and analysis instruments. They are the key optical elements of these instruments. The standard JB/T 13360-2018 Interference filters used for fluorescence detection analysis is used to specify these filters. This paper interpreted some important contents of the standard. The terms of fluorescent filters and their functions in light path systems were introduced. Two kinds of “Representation of spectral characters” and their main advantages were introduced. The reasons for defining the spectral parameters of type I and type II given in the standard were introduced. This paper aims to guide readers to understand and use the standard better.

The research progress of sol-gel technology used to prepare AZO film are reviewed. The influence of sol-gel parameters such as aging time,heating processing,quantity of dopant aluminum,kinds of activator and thickness of film on the structure and optical electrical properties of AZO film are discussed and summarized. The advantage and insufficiency of sol-gel technology were pointed out and research direction of future were proposed.

This paper introduces the development of a kind of compound molecular pump with ultra-high vacuum and large pumping speed.The rotor of the molecular pump adopts the composite structure of turbine blade and spiral groove traction stage, which is manufactured by integral processing. It focuses on the design and optimization of the composite rotor, and briefly introduces the design and improvement of the integral structure of the stator and spacer ring and the composite chassis structure. The pumping speed of the composite molecular pump is about 10% higher than that of the same diameter turbo molecular pump. At the same time, it has higher compression ratio and resistance to the front stage pressure. It can be started under the vacuum pressure of 100 Pa. The exhaust end does not need to match a larger front stage pump to meet the pumping requirements. This type of molecular pump has better dynamic balance, simple structure and higher integration, and the manufacturing cost of the whole machine is lower than that of the turbo molecular pump.

The KM6 space environment simulator(named as the“KM6 chamber”), as an important large-scale test equipment for China′s manned space industry, has been in service for more than 20 years and has completed nearly 100 system-level vacuum thermal tests. The rough vacuum system is one of the most important components of the KM6 chamber.Its main function is to evacuate the KM6 chamber from atmospheric pressure to below 5Pa. In order to deeply understand the pressure change law in the roughing process, to provide a theoretical reference for the stable operation of the roughing system and subsequent upgrades, and to verify the applicability of CFX for the simulation analysis of the extraction process of large chambers, this article combines 5 sets of vacuum thermal test data in the experiment roughing process to analyze, and the pressure change law of each stage of the pumping process is given.

Someone large wind tunnel test with high gas temperature and large flow requires for better vacuum exhaust equipment, and the traditional wind tunnel exhaust equipment cannot meet the requirements. To achieve the purpose of reducing the scale and cost, the first large displacement, high speed centrifugal vacuum pump was applied to the wind tunnel test equipment. In this paper, the pneumatic structure of centrifugal vacuum pump is designed according to the exhaust requirement of wind tunnel test. Using three-dimensional numerical simulation software to simulate the internal flow of centrifugal pump, in order to give full consideration to the asymmetry of the internal flow of centrifugal pump, the flow characteristics of rotor of the centrifugal pump the whole channel simulation analysis. The results show that the design of centrifugal pump flow, the ultimate vacuum and other indexes meet the design requirements, which is verified in actual work and better complete the wind tunnel test for vacuum exhaust security work.

In the process of beam adjustment of 230 MeV superconducting cyclotron, it is necessary to measure and analyze the intensity, shape and alignment of the beam. The beam measuring device can meet the above requirements. In this device, the radial probe and envelope probe can be used to measure the beam current in the range of R150 mm to R850 mm. The double X-ring sealing structure is adopted, which greatly shortens the radial space and has good sealing performance. The linear driving device is stable and reliable, and the probe pole drives the head of radial probe with high precision. Our work may provide reference for the design of the beam measuring device.

With the development of miniaturization,high density and high reliability of semiconductor device packaging,high temperature uniformity is required for brazing heat field in semiconductor industry. Selecting a type of vacuum brazing furnace as the research object,the technique of finite elements simulation is applied to analyze the distribution of temperature field as well as its change rule inside of the furnace. The basic procedure for carrying out finite elements analysis is introduced. With the aim to analyze the temperature uniformity,the finite elements simulation model is established based on practical engineering data,and the distribution of temperature field and its change process are obtained. By comparing with the test data,the effectiveness of the model and simulation procedure is verified. The results show that the distribution of the furnace temperature field meets the design requirement. Moreover,the corresponding simulation results also provide theoretical foundation and effective means for the optimization and improvement of such kinds of equipments.

According to the process and control requirements of the vacuum sintering furnace for porous metal materials, the original control system is modified. The industrial control computer is used as the host computer and the monitor human-computer interface is configured. PLC and temperature controller are used as the lower computer for programming, which improve the operation reliability, operation automation and process stability. Based on the production and operation, the problems of process control accuracy, operation convenience and energy saving are solved, realizing the purpose of modification.

This article reviews a new type of plasma,helicon plasma, which is characterized by its simple structure and generation of high-density plasma. First, the basic principle of helicon plasma is described briefly, including the helicon plasma source structure, heating mechanism, antenna form and energy coupling mode. Then, the characteristics and diagnosis methods of the helicon plasma are introduced. Among them, the ion energy distribution(IED)by the retarding field energy analyzer(RFEA)is emphasized, and the factors affecting IED value are analyzed. Subsequently, the application progresses of the helicon plasma in the three fields of etching, thin film deposition and electric propulsion are mainly introduced. Finally, the future perspectives of helicon plasma source and some challenges are pointed out.

A control method combined with fuzzy neural network and PID control was used to design a temperature monitoring system for modern power station boilers. The BP fuzzy neural network is used to achieve fuzzy processing of the data, and then is adjusted by the PID controller to achieve real-time temperature control. From the simulation using the Simulink software and monitoring the temperature of the power plant boilers, it is shown that the BP fuzzy neural network uses gradient descent to adjust layer by layer. The weight coefficient realizes a significant reduction of the mean square error. The fuzzy neural network PID control can speed up the system′s operation speed, improve the control accuracy, and obtain a faster response speed and a smaller amount of overshoot.

Electron beam-physical vapor deposition, scanning electron microscopy, X-ray diffraction and finite element simulation were used to study the effect of crack in micrometer scale on the failure of water-cooled oxygen-free copper crucible. The temperature distribution of the water-cooled copper crucible ranged from 33 to 183 ℃, and the highest temperature region was referred to the interference fit at the water channel near the water outlet. The cross section of the upper part of the inner wall had a large temperature gradient, which induced large thermal stress. The reason of the failure of the water-cooled copper crucible was the macrocrack induced by the thermal stress, rather than the corrosion of molten metal cerium and the formation of harmful impurity phase. The macrocrack was rooted in the microcrack in tens of micron induced by the interference fit at the water channel during the manufacturing processes of copper crucible. Under the effect of thermal stress, the microcrack grew into the approximately straight crack band. The crack band was composed of cracks with approximately parallel extension direction. Then the growing crack penetrated through the inner wall of the water-cooled copper crucible, which made the copper crucible failure. The frontal area of the inner wall varied a little in the crack growth. No obvious change happened at the regions other than the inner wall of copper crucible.

Steam plasma jet has the advantages of higher security, plenty of hydroxyl component, good environmental protection and cheap working medium, etc. It is a promising tool in the hazardous waste treatment and chemical synthesis. However, as steam is easy to condense during the transportation process, it will seriously affect the stability of plasma torch as well as its service life, limiting its wide application in industries. In this paper, a series of techniques were proposed to prevent the condensation of the steam. A special steam plasma torch was designed. A data acquisition system and optical emission spectrometer were used in experiments to reveal the working characteristics of this steam plasma torch. The experimental results show that the stability of the as-designed steam plasma generator is better than that of the conventional one. In addition, the arc voltage increases with the increases of the arc current or steam flow rate. As the special substance in steam plasma, the hydroxyl′s relative content increases with the increase of arc current, but decreases with the increase of the steam flow rate.

Through a series of etching experiments, the effects of process parameters such as CF4 flow rate and RF power on etched silicon-based materials in the process of reactive ion etch(RIE)were studied. The corresponding etching parameters such as etch rate, uniformity and selection ratio, etc. were obtained by using different technological conditions. The results are compared and analyzed, and the relatively optimum technological conditions are obtained, which can realize the anisotropy etch of silicon. The application of silicon-based material etching technology in semiconductor technology has been explored experimentally in this paper.

The continuous expansion of the application field of vacuum technology has promoted the mutual integration of different disciplines and the birth of interdisciplinary. The advancement of ultra-high vacuum and high-vacuum technology has promoted the development of high-tech industries such as semiconductors, aerospace and nuclear power energy, and has provided a guarantee for the sustainable development of mankind. In recent years, vacuum chambers, pumps, valves, and seals have made new progress driven by the development of additive manufacturing, nuclear fusion, particle accelerators, and integrated circuits, which have supported important theoretical verification and major engineering construction, and gave birth to new scientific research achievements. This article focuses on the typical applications of several vacuum technologies, and discusses the key technologies among them.