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VACUUM ›› 2021, Vol. 58 ›› Issue (4): 36-41.doi: 10.13385/j.cnki.vacuum.2021.04.07

• Vacuum Acquisition System • Previous Articles     Next Articles

Design of a Compound Molecular Pump With Ultra-high Vacuum and High Pumping Speed

YU Jin-jun, DO Xin, LIU Min-qiang   

  1. Beijing Sihai Xiangyun Fluid Technology Co., Ltd, Beijing, 101100, China
  • Received:2021-01-05 Online:2021-07-25 Published:2021-08-05

Abstract: This paper introduces the development of a kind of compound molecular pump with ultra-high vacuum and large pumping speed.The rotor of the molecular pump adopts the composite structure of turbine blade and spiral groove traction stage, which is manufactured by integral processing. It focuses on the design and optimization of the composite rotor, and briefly introduces the design and improvement of the integral structure of the stator and spacer ring and the composite chassis structure. The pumping speed of the composite molecular pump is about 10% higher than that of the same diameter turbo molecular pump. At the same time, it has higher compression ratio and resistance to the front stage pressure. It can be started under the vacuum pressure of 100 Pa. The exhaust end does not need to match a larger front stage pump to meet the pumping requirements. This type of molecular pump has better dynamic balance, simple structure and higher integration, and the manufacturing cost of the whole machine is lower than that of the turbo molecular pump.

Key words: compound molecular pump, integral rotor, composite rotor, high pumping speed

CLC Number: 

  • TH36
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