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VACUUM ›› 2021, Vol. 58 ›› Issue (5): 50-56.doi: 10.13385/j.cnki.vacuum.2021.05.08

• Thin Film • Previous Articles     Next Articles

Study on Electrochromic Properties of Tungsten Oxide Films Deposited by Medium Frequency Magnetron Sputtering

WEI Meng-yao1,2, WANG Hui1, HAN Wen-fang1,2, WANG Hong-li2, SU Yi-fan2, TANG Chun-mei2, DAI Ming-jiang2, SHI Qian2   

  1. 1. South China University of Technology,School of Materials Science and Engineering,Guangdong Key Laboratory of Advanced Energy Storage Materials,Guangzhou,510640;
    2. Guangdong Academy of Sciences,Guangdong Institute of New Materials,National Engineering Laboratory for Modern Surface Engineering Technology,Guangdong Key Laboratory of Modern Surface Engineering Technology,Guangzhou 510651,China
  • Received:2020-10-12 Online:2021-09-25 Published:2021-09-23

Abstract: The tungsten oxide（WO3） films on transparent conductive indium oxide glass were prepared by mid-frequency magnetron sputtering technique.The effect of sputtering pressure on the microstructure and optical properties of WO3 thin films was studied.The composition and surface morphology of WO3 films were analyzed by X-ray diffraction analysis and scanning electron microscopy.The electrochromic voltammetry,light modulation and cycle life of the WO3 films were studied by electrochemical workstation and UV-Vis spectrophotometer.The chemical composition and oxidation state of WO3 film in the state of coloring and bleaching were analyzed by X-ray photoelectron spectroscopy.The results show that the WO3 films are all amorphous.With the increase of sputtering pressure,the morphology of WO3 films structure becomes loose and rough,which is in favor of the intercalation/de-intercalation of Li+.The films deliver the fast response speed,wide amplitude modulation and excellent electrochromic performance,however,the poor cycling stability.When the sputtering pressure is 4Pa,the best electrochromic properties with the modulation amplitude of 81.0% at 550nm and coloring/bleaching response time of 7.8s/5.85s were obtained,which were well maintained after 1500 cycles.

Key words: WO3 thin film, mid-frequency magnetron sputtering, electrochromism, sputtering pressure, cycle lifetime

CLC Number: 

  • TB34
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