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VACUUM ›› 2022, Vol. 59 ›› Issue (1): 18-23.doi: 10.13385/j.cnki.vacuum.2022.01.04

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Effect of Substrate Bias Mode on Structure and Hydrogen Resistance of CrN Thin Films

ZHANG Hui1, Wang Xiao-bo2, ZHANG Wei-xin1, GONG Chun-zhi1, TIAN Xiu-bo1   

  1. 1. State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China;
    2. Institute of Materials, China Academy of Engineering Physics, Mianyang 621908, China
  • Received:2021-06-17 Online:2022-01-25 Published:2022-01-27

Abstract: In order to avoid the failure of metal materials due to hydrogen diffusion, oxide or nitride films are usually prepared on the surface of metal materials. The microstructure and crystal structure of the films have significant influence on the hydrogen resistance. In this paper, CrN hydrogen barrier films were prepared on stainless steel. The effects of high/low substrate bias modulation mode on the structure and hydrogen resistance of CrN films were studied systematically. CrN thin films with high temperature oxidation resistance were prepared by high power pulsed magnetron sputtering under four groups of substrate bias modes. The results show that under 20min×3 mode, the films are double-layer structure, and the others are single-layer films. When the substrate bias is 100V and 500V, the impact effect on the film is very different by ion. Under 10min×6 mode, the columnar crystal is broken before it grows because of frequent matrix bias change, so the film is the thinnest, but the grain is refined and the density of the film is the highest. Under 20min×3 mode, the hydrogen inhibition rate of the film was the highest, reaching 95.7%, the diffusion coefficient of hydrogen atom is the smallest, which is 3 orders of magnitude lower than that of 316L stainless steel. The oxidation resistance of CrN films is not much different under the four kinds of substrate bias modes, and the oxygen gain per unit area is about half of that of the 316L stainless steel. The oxidation resistance of CrN films prepared by this experiments is twice that of the 316L stainless steel, and they have excellent high temperature oxidation resistance.

Key words: substrate bias mode, CrN, high power pulsed magnetron sputtering, hydrogen blocking, high temperature oxidation resistance

CLC Number: 

  • TG174
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