Abstract: In order to study the relationship between composition of composite film and target used in multi-arc ion plating technology, and to compare the tribological properties of (Ti, Cr) N film with different composition, five targets - namely pure Ti target, pure Cr target and titanium-chromium alloy targets with titanium-chromium ratio of 9:1, 4:1 and 1:1 were designed and fabricated. Scanning electron microscopy was used to observe the micro-morphology of the film. X-ray energy spectrum analyzer was used to analyze the composition of the micro-area qualitatively and semi-quantitatively. X-ray diffraction was used to analyze the structure of the film. The wear resistance of the film was tested by friction and wear tests. Finally, the wear volume was calculated with the width, depth and length of the wear marks, and the wear volume was used to characterize the wear resistance of different films. The results show that composition of film prepared by the alloy target is not the same as that of the target, but all of them show TiCrN(200)preferred orientation. The surface of TiCrN film prepared by pure target is the most delicate and the roughness of TiCrN film decreases with the increase of Cr content. The hardness and wear resistance of TiCrN films are obviously better than those of pure target films. Ti_0.3Cr_0.23N films prepared by target(Ti:Cr=4:1)have the highest hardness(HV_0.053274.9)and the best wear resistance. When the film is prepared by alloy target, the composition of the film is greatly affected by the ionization rate of single metal, not the metal ratio of the target. And adding hard elements to the film can improve the quality and wear resistance of the film.

Key words: multi-arc ion plating technology, alloy target, TiCrN film, wear resistance