空间行波管专用排气工艺极高真空系统的研制

doi:10.13385/j.cnki.vacuum.2022.05.09

Abstract

Abstract: Space TWTs are widely used in communication satellite, radar satellite, positioning and navigation and other fields. The acquisition and maintenance of extra high vacuum is the key to the high reliability and long life of space TWTs. The extra high vacuum(XHV) of TWTs needs to be obtained on special vacuum exhaust equipment. Vacuum exhaust system is the most important process in the manufacturing process of micro-wave vacuum electronic devices. The acquisition and maintenance of XHV involves a variety of vacuum related technologies, including the choice of materials, the optimized design of vacuum chamber, vacuum pump selection, acquisition and measurement of extra high vacuum, vacuum degassing technology, high sensitive vacuum leak detection and residual gas analysis technology. This paper introduces the development process of space TWTs extra high vacuum system equipment and its application in scientific research and production. The vacuum system realizes that the no-load vacuum degree is better than 1×10^-9Pa, and the multi-channel load vacuum degree is better than 5×10^-9Pa, which has a certain reference value for the acquisition of ultrahigh vacuum and extra high vacuum, and the manufacturing process and application of vacuum exhaust equipment.

Key words: XHV, space TWTs, vacuum exhaust, outgassing rate

CLC Number:

TB751

LU Shao-bo, YAO Zheng, SONG Yan-peng, HAN Yong-chao, ZHANG Ji-feng, TANG Rong. Development of XHV System for Customized Vacuum Exhaust Process for Space TWTs[J].VACUUM, 2022, 59(5): 50-54.

References

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Development of XHV System for Customized Vacuum Exhaust Process for Space TWTs

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