Amorphous alloy films have been widely investigated because of their excellent properties such as non-stick and corrosion resistance, which are especially prominent for bulk-metallic-glass-forming Zr₅₅Cu₃₀Al₁₀Ni₅ composition. In this work, amorphous alloy films are prepared by magnetron sputtering using Zr₅₅Cu₃₀Al₁₀Ni₅ bulk metallic glass as the target. The effects of different sputtering power on the mechanical properties, non-stick, corrosion resistance and surface roughness of the films were studied. The results show that high-quality amorphous films, as evaluated by mechanical properties, non-stick, and corrosion resistance, can be obtained at a magnetron sputtering power range from 75W to 165W, with hardness of ~9.2GPa, modulus of elasticity of ~164GPa, hardness-to-elasticity ratio of ~0.055, self-corrosion current density of ~1.16μA·cm^-2, self-corrosion potential of -241.27mV, and the maximum wetting angle of 104°. Such data are generally comparable with the reported ones（the hardness is even higher）, confirming a good potential for non-stick and corrosion resisting purposes.

In recent years, palladium thin films have attracted wide attention due to their excellent properties such as low resistivity and high catalytic activity. Palladium and its alloy thin films have gained more and more interest from researchers in the applications of integrated circuit interconnection, hydrogen sensing, hydrogen storage and catalysis. There are many researches of the preparation of palladium metal film, this article focuses on the research development of preparation of palladium membrane using physical vapor deposition, chemical vapor deposition, atomic layer deposition and plasma auxiliary atomic layer deposition technology, and discusses the pros and cons of various preparation methods, sums up the precursor used to do, and prospects the development trend of preparation technology of palladium film.

CrCN films prepared by magnetic filtration cathodic arc deposition（FCVAD）technology have excellent mechanical properties and can be used as surface modified films in textile equipment, pcb drill bits and piston rings. In this paper, the thermal stability of CrCN films was investigated for the situation that the structure and properties of films will change due to high temperature caused by friction or high temperature of application environment. Structure of the films from room temperature to 800℃ was characterized by X-ray diffraction（XRD）, field emission scanning electron microscopy（FESEM）, Raman spectroscopy（Raman）, and X-ray photoelectron spectroscopy（XPS）. The results show that the upper limit of thermal stability of CrCN films prepared by FCVAD technique is about 400℃. When the temperature is below 400℃, the structure of CrCN films is stable and remains disordered. When the temperature reaches 500℃, fine grains appear on the surface of the films, and the CrN phase in the films is transformed into Cr₂N phase. As the temperature continues to increase, the CrCN solid solution phase starts to graphitize, and the grain size within the films becomes larger. When the temperature is greater than 700℃, carbon in the films leaves in the form of CO or CO₂, and Cr element exists in the form of Cr₂O₃ phase and grows into grains with a size of about 400nm at 800℃.

Three kinds of aluminide coatings were fabricated by chemical vapor deposition（CVD）on the surface of the nickel-based superalloy substrates at the deposition pressure of 150, 200 and 250 mbar, respectively. The effect of deposition pressure on phase structure and high temperature oxidation behavior of the specimens with aluminide coating was systematically investigated. The phase structure, surface morphology and elemental composition of the three kinds of aluminide coatings were analyzed by XRD, SEM and EDS. The results indicate that the phase constituents of three kinds of aluminide coatings are detected to be β-NiAl. Two phases including of Ni_1.04Al_0.96 and Ni_1.1Al_0.9 are gained in the coating specimens prepared at the deposition pressure of 200 mbar. After the isothermal oxidation at 1100℃ for different dwelling times, the main phase β-NiAl transforms into γ′-Ni₃Al with formation of Al₂O₃. Differently, the peak intensity of γ′-Ni₃Al phase is the weakest for the specimens deposited at the pressure of 250 mbar. The oxidative weight gain rate of the three aluminide coatings is 0.037, 0.022 and 0.018g/（m²·h）, respectively. The oxidation weight gain of the coating specimens at the deposition pressure of 150 mbar is correspondingly larger than that of the other two coating specimens. The lower deposition pressure is, the more micropores on the surface of the coating exist,and the more easily microcracks appear on the thin film of the coating surface and further form into the spllation of oxide scale after high temperature oxidation. Based on the experimental results, the coating specimens prepared at deposition pressure of 250 mbar show the best surface microstructure,elemental content and high temperature oxidation resistance.

The multi-arc ion plating method was adopted to prepare ZrN single-layer films and Zr/ZrN multilayers with different modulation ratios, respectively, and the effects of modulation ratio on mechanical properties of the multilayers were studied. X-ray diffractometer, scanning electron microscopy and micro-indenter were used to characterize the phase structure, surface morphology, hardness and adhesive strength of the films. The results show that the ZrN layer within the multilayers has higher crystallinity. Surface morphology of the films is flat, and microstructure of the surface is dense. Some spherical Zr particles are distributed on the surface. Hardness of the Zr/ZrN multilayers is higher than that of the single ZrN film, and it first increases and then decreases with the modulation ratio. When the modulation ratio is 1∶1, hardness of the Zr/ZrN multilayers reaches 1541.58 Hv, while the adhesive strength is 51.61N.

With the wide application of thin film materials in modern industry,arc ion plating technology has become an important method for preparing functional films, such as functional surface modification and surface metallization of composite materials in the field of aerospace. In order to verify the state of cathode spot movement under different magnetic fields, the cathode spot on Ti target was controlled by magnetic field. TiN films were prepared under five magnetic fields, and the surface morphology, microstructure, chemical composition and thickness of TiN film were detected and analyzed through scanning electron microscope, energy disperse spectroscopy, step profiler and X-ray diffractometer. The results show that the film has the least number of large particles, the film is the thickest, and the crystal preferential growth direction is (111) crystal plane, when the cathode spot controlled by the magnetic field is uniformly distributed on the entire Ti target surface and the cathode spot movement speed increased.

With the rapid development and wide application of parylene coating technology, how to effectively increase the utilization rate of parylene materials, improve the quality of the film, and reduce costs has been widely concerned in the industrial production process. In this paper, depending on the structural characteristics and application status of conventional parylene vacuum coating equipment, a type of parylene vacuum coating equipment with a built-in pyrolyzer is developed, in which flow characteristics of rare gas, heat transfer and industrial production requirements are concerned. At the same time, according to the unique environmental conditions of the parylene coating room and the characteristics of the film to resist acid and alkali, salt spray and mold, coating protection for flowers and low-moisture dry seeds is proposed, which will expand the application of parylene coating technology in the agricultural field.

Compared with the vapor jet vacuum pump system served at present,the high differential pressure Roots pump combination pumping system is being widely used for large vacuum distillation unit because it has the characteristics of quick start and obvious energy saving effect.In this paper,one kind of combination pumping system consisted of high differential pressure roots pump used in a large vacuum distillation deep cut unit is introduced,and the structure,control principle,performance parameters and solutions to some key technical problems of the system are described in detail.

Space TWTs are widely used in communication satellite, radar satellite, positioning and navigation and other fields. The acquisition and maintenance of extra high vacuum is the key to the high reliability and long life of space TWTs. The extra high vacuum(XHV) of TWTs needs to be obtained on special vacuum exhaust equipment. Vacuum exhaust system is the most important process in the manufacturing process of micro-wave vacuum electronic devices. The acquisition and maintenance of XHV involves a variety of vacuum related technologies, including the choice of materials, the optimized design of vacuum chamber, vacuum pump selection, acquisition and measurement of extra high vacuum, vacuum degassing technology, high sensitive vacuum leak detection and residual gas analysis technology. This paper introduces the development process of space TWTs extra high vacuum system equipment and its application in scientific research and production. The vacuum system realizes that the no-load vacuum degree is better than 1×10^-9Pa, and the multi-channel load vacuum degree is better than 5×10^-9Pa, which has a certain reference value for the acquisition of ultrahigh vacuum and extra high vacuum, and the manufacturing process and application of vacuum exhaust equipment.

Air has become one of the key constraints for the further acceleration of high-speed trains.In order to develop the next generation of higher-speed transportation systems, an innovative transportation system concept combining low-vacuum pipes and ultra-high-speed trains has been proposed and developed. In this paper, a two-dimensional calculation model of the tube train is established, and the shock wave characteristics of the supersonic train running in tube are analyzed based on the verified grid and turbulence model. It is concluded that when the supersonic train is running, the shock wave in front of the train forms a congested section forward in the form of a normal shock wave. The position of the normal shock wave moves forward with the running time, and the position of the pressure surge moves forward synchronously, but the pressure rise ratio before and after the shock wave is basically unchanged. The running time and the running Mach number affect the length of the congested section. The shock wave will undergo multiple Mach reflections between the tube and the train body and in the wake area to form a shock wave train. As the running time increases, the shock wave between the tube and train body weakens, and the intensity of the shock wave and reflected shock wave at the rear of the train is strengthened.

In order to realize the efficient operation of the vacuum heat treatment furnace, this paper takes a certain type of vacuum heat treatment furnace fan as the object, and studies the influence of the inlet and outlet angles of the fan impeller blades on the cooling efficiency. The SST k-ω turbulence model is used to simulate the fan fluid domain. The pressure distribution and velocity vector change in the impeller, the wind speed and wind speed uniformity at the outlet of the fan are analyzed, and the optimized blade entry angle and exit angle parameters are obtained. The impeller before and after optimization are tested to explore the changes of cooling efficiency and energy saving and consumption reduction of vacuum heat treatment furnace. The results show that when the blade inlet angle is 36° and the outlet angle is 54°, the wind speed and wind speed uniformity at the outlet of the fan volute are better, which meet the technological requirements of the vacuum heat treatment furnace. By optimizing the inlet and outlet angles of the fan impeller blades, the performance of the air cooling system of the vacuum heat treatment furnace is significantly improved. The cooling efficiency of the whole machine is increased by 15.6%, and the energy consumption of the whole machine is reduced by 14.3%. For vacuum heat treatment furnaces with a double-side air outlet structure, there will be a local high pressure area in the volute on the side where the outlet is closed, and the impact of the high pressure area on the impeller outlet should be minimized as much as possible.

High power proton beam accelerators are widely used in basic physics, nuclear industry, family safety and other fields, in which high-power waveguide RF cavity is very important. Boat shaped RF cavity has the highest no-load Q value and shunt impedance, which is a good choice for GeV proton beam accelerator. For the manufacture of boat shape copper cavity, the biggest difficulty lies in the forming of boat shape cavity and the welding of copper. In this paper, the 6mm thick semi-Y-state oxygen free copper(OFC) electron beam welding joint is studied, and a detailed vacuum electron beam welding process is developed. The results show that after electron beam welding, the welded joint of semi-Y-state OFC plate has no obvious surface defects, and the as-cast microstructure is equiaxed crystal. From weld to base metal, the microhardness of semi-Y-state OFC welded joint changes significantly, and the microhardness of weld is about 65% of the base metal. After stretching at room temperature, the semi-Y-state OFC welded joint has obvious plastic deformation, and the fracture occurs in the weld fusion zone. The tensile strength of semi-Y-state OFC welded joint is equivalent to 95% of the base metal, about 228MPa, and the elongation after fracture is 64%-67%, which can meet the welding and forming requirements of boat shape RF cavity. In this paper, the vacuum electron beam welding process of semi-Y-state OFC plate is introduced in detail, which provides a test basis for the manufacture of boat shape RF cavity.

The glow discharge characteristics of He/Ne gas mixture in the resonator of laser gyroscope are studied. By establishing the corresponding two-dimensional fluid model, the basic physical equations are numerically solved by COMSOL finite element method, and the discharge characteristics such as discharge voltage, current and spatial distribution of charged particle density are obtained. The effects of applied voltage, mixed gas pressure and mixed gas ratio on the discharge characteristics of mixed gas in the resonator are analyzed and discussed. The results show that with the increase of applied voltage, the maintenance voltage, electron density, He⁺ and Ne⁺ number density increase, and the increase range of electron density is higher than that of He⁺ and Ne⁺. with the increase of air pressure, the maintenance voltage increases gradually, the electron density and He⁺ number density first increase and then decrease, and the extreme value of electron density is 5.85×10¹³cm^-3, the number density of Ne⁺ decreases slightly. With the increase of Ne mass fraction in the gas, the maintenance voltage, electron density and He⁺ number density increase gradually, and the increase range of electron density and He⁺ number density is roughly the same, and the Ne⁺ number density remains basically unchanged.

Carbon nanotube is a one-dimensional quantum material with special structure. It has excellent mechanical, electrical and chemical properties. It is an ideal candidate material for electronic components in the future. When carbon nanotubes are used in spacecraft, the influence of space charged particle radiation environment on their properties should be fully considered. According to the space application requirements of carbon nanotubes and based on the radiation environment of charged particles in geosynchronous orbit, this paper studies the effects of electrons and protons on the microstructure and conductivity of carbon nanotube paper. The electron energy is 200.0kev, 500.0keV and 1000keV, and the proton energy is 500.0keV and 1.0MeV. The results show that the degradation of the electrical properties of carbon nanotube paper materials is due to the change of surface structure of the material, and the number of defects in the material increases under irradiation, which affects the migration path of carriers in the material and leads to the decline of its electrical properties.

With the rapid development of aerospace technology, the situation of vacuum container attached to the outer board of the aircraft often happens. Lifting rings are often used to fix airborne external mounting devices, and often need to bear extremely high acceleration load, so the structural design and stress and deformation analysis of lifting rings are particularly important. In this paper, structural design of the lifting ring applied to airborne external vacuum chamber is carried out, and statics analysis using ANSYS Workbench and topology optimization is carried out on this basis. The results of simulation show the impact of circular ring thickness and lifting ear thickness on the stress and deformation of the lifting ring. The best design parameters are obtained, and the lightweight design of the lifting ring is realized, which may provide a certain reference for the design of airborne lifting ring.

This article briefly introduces the basic principles of relativity and quantum mechanics, which cites the recent scientific news to discuss the application and usage of vacuum science and technology in these fields. As we know(everyone knows, including the content that does not appear in the books), as the mother of the universe, vacuum is bigger and older than the universe. Moreover,vacuum is the physical environment of relativity and quantum mechanics. Vacuum science and technology is an essential theory for the study of relativity and quantum mechanics. The morden physics is on the eve of a great revolution. The research problems of black holes, dark matter, dark energy, gravitational waves and the origin of particles have put forward serious challenges to physics. Perhaps physics can gain ground from studying scientific problems or resolving the contradictions between relativity and quantum mechanics. This article is divided into three parts: (1) The recent progress of relativity and vacuum technology; (2) Previous ideology frames were sorted out; (3) The relevant knowledge of quantum mechanics and zero point energy.