差压法测定NEG吸氢性能*

doi:10.13385/j.cnki.vacuum.2024.03.09

Abstract

Abstract: By improving the constant pressure method, the differential pressure method was proposed to test the hydrogen absorption performance of non-evaporable getter (NEG). A constant conductance element is installed between the gas room and the induction chamber to provide controllable inlet flow with micrometering valve. The sorption performance parameters of NEG can be calculated by measuring the pressure of induction chamber, gas room and reference chamber. The sorption performance of two NEG absorbers measured by the improved constant pressure method and differential pressure method were compared during sorption test. The results show that the sorption capacity measured by differential pressure method is 0.07268 Pa·L lower than that measured by improved constant pressure method. The suction of clean chamber wall leads to higher test results of the improved constant pressure method than the actual result, while the test results of the differential pressure method are not affected, and the results of the modified improved constant pressure method are close to those of the differential pressure method. The differential pressure method can obtain more accurate and effective performance parameters of getters. In the differential pressure method, the reference part and the experimental part are tested at the same time, which can shorten the test time and reduce the error caused by inlet controlling.

Key words: differential pressure method, hydrogen absorption performance, non-evaporable getter (NEG), improved constant pressure method

CLC Number: TB771

WANG Jing-hua, WANG Lan-ling, LIN Wen-yu, WU Jun, CAO Qing, WANG Xu-di. Measurement of Hydrogen Absorption Performance of NEG by Differential Pressure Methods[J].VACUUM, 2024, 61(3): 51-56.

References

[1] ANASHIN V V, KRASNOV A A, SEMENOV A M.A study of the gettering characteristics of getter pumps for different gases[J]. Instruments and Experimental Techniques, 2020, 63: 893-896.
[2] DAS B K, DAS R, VERMA R.Improvement of deuterium emission by St 172 NEG pump in a sealed off vacuum device[J]. Vacuum, 2020, 181: 109743.
[3] 冯天佑, 陈联, 朱建炳, 等. 锆钒铁吸气剂的研究现状及进展[J]. 真空与低温, 2017, 23(1): 9-10.
[4] MASE K, TANAKA M, IDA N, et al.Development of low-cost, high-performance non-evaporable getter (NEG) pumps[J].AIP Conference Proceedings,2016,1741(1): 030015.
[5] 王俊儒, 余耀伟, 吴金华, 等. 新型吸气剂泵真空测试系统的搭建与实验研究[J]. 真空科学与技术学报,2018, 38(10): 834-837.
[6] 崔航, 崔建东, 徐瑶华, 等. Zr_xV_yFe_z低温激活吸气剂的CO吸气动力学研究[J]. 真空科学与技术学报,2016, 36(3): 278-281.
[7] 汪文林, 张斌, 赵洪常, 等. 基于LabVIEW的吸气剂吸气性能定容测试系统[J]. 真空, 2010, 47(6): 54-55.
[8] PETKOV M P, SOULES D M.UHV system for quasistatic characterization of adsorbers for medium vacuum applications[J]. Vacuum, 2018, 151: 254-260.
[9] 张瑞年, 陈联, 赵澜, 等. 一种提高氧化钯氢吸附特性测试准确性的方法[J].真空与低温, 2020, 26(4):328-332.
[10] ZHANG Y, WEI X Y, MAO C H, et al.Preparation and pumping characteristics of Ti-7.5wt.% Mo getter[J]. Journal of Alloys & Compounds, 2009, 485(1/2): 200-203.
[11] 李岸林. 面向MEMS真空封装的3D纳米支架基吸气剂的制备和性能研究[D]. 厦门:厦门大学, 2018.
[12] ERJAVEC B, SETINA J.Investigations of a method for determining pumping speed and sorption capacity of nonevaporable getters based on in situ calibrated throughput[J]. Journal of Vacuum Science & Technology A 2011, 29(5): 051602.
[13] 王蓝陵, 林文豫, 王婧华, 等. 基于新型固定流导元件的定压法NEG吸气性能测试方法研究[J]. 真空科学与技术, 2022, 42(12): 937-942.
[14] BATTES K, DAY C, HAUER V.Outgassing rate measurements of stainless steel and polymers using the difference method[J]. Journal of Vacuum Science & Technology A, 2015, 33(2): 021603.
[15] SEFA M, FEDCHAK J A, SCHERSCHLIGT J.Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers[J]. Journal of Vacuum Science & Technology A,2017, 35(4): 041601.
[16] 陈江, 杨斓, 成大鹏, 等. 铯束管的出气率模型及应用[J]. 真空与低温, 2019, 25(6): 368-371.
[17] ROZANOV L N.The water outgassing rate of internal surfaces of vacuum systems[J]. Journal of Physics: Conference Series, 2016, 729: 012001.
[18] ROZANOV L, KIRILLOV A.Non-stationary volume-adsorption model for pumping of vacuum chambers[J]. MATEC Web of Conferences, 2018, 245: 04007.
[19] HAUER V, BATTES K, FLÄMMICH M, et al. Outgassing rate measurements with the difference method in the framework of EMRP IND12[J]. Vacuum,2015,122:250-254.
[20] 张亚平, 朱颖峰, 刘湘云, 等. 基于材料放气特性的杜瓦真空失效时间研究[J]. 真空, 2016, 53(1): 46-50.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2]	ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[4]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[5]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
[6]	XU Fa-jian, WANG Hai-lei, ZHAO Cai-xia, HUANG Zhi-ting. Application of chemical gases vacuum-compression recovery system in environmental engineering[J]. VACUUM, 2018, 55(5): 29 -33 .
[7]	XIE Yuan-hua, HAN Jin, ZHANG Zhi-jun, XU Cheng-hai. Discussion on present situation and development trend of vacuum conveying[J]. VACUUM, 2018, 55(5): 34 -37 .
[8]	SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[9]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[10]	CHANG Zhen-dong, MU Ren-de, HE Li-min, HUANG Guang-hong, LI Jian-ping. Reflectance spectroscopy study on TBCs prepared by EB-PVD[J]. VACUUM, 2018, 55(5): 46 -50 .

Measurement of Hydrogen Absorption Performance of NEG by Differential Pressure Methods

Abstract

Cite this article

share this article

References

Related Articles 7

Metrics

Comments

Recommended 10

[1]	ZHENG Yi-ming, WANG Xu-di, WU Jun. Research Progress in Quantization of Vacuum Metrology [J]. VACUUM, 2023, 60(6): 9-14.
[2]	LI Xiao-gang, HU Yong, GAO Feng, HU Xiang-e, GAN Zhi-hua. Design of Gas Adsorption Performance Measurements at Low Temperature and Low Pressure [J]. VACUUM, 2023, 60(1): 42-45.
[3]	LU Shao-bo, ZHANG Ji-feng, HAN Yong-chao, YANG Kun, TANG Rong. Development of Dynamic Calibration System for Special Vacuum Tester [J]. VACUUM, 2022, 59(6): 56-59.
[4]	YANG Su-xia, SHEN Wen-zhuo. Design of Control System Based on Intelligent Composite Coating Equipment [J]. VACUUM, 2022, 59(1): 68-73.
[5]	WANG Xun. Vacuum Measurement and Application for Aerospace [J]. VACUUM, 2021, 58(1): 15-18.
[6]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer [J]. VACUUM, 2018, 55(5): 15-18.
[7]	SUN Dong-hua, CHEN Lian, ZHAO Lan, ZHANG Rui-fang, DING Dong, ZHANG Rui-nian. Research on Detection Methods of Cavity Pressure Change of Semitight Devices [J]. VACUUM, 2019, 56(4): 10-14.