Abstract: As the core device of communication equipment, vacuum electronic devices play a vital role in the fields of national defense advanced technology and space communication. In recent years, with the rapid development of new technologies such as terahertz, higher requirements has been put forward for the performance of vacuum electronic devices, and it is urgent to replace, which has prompted the growing demand for process equipment with high index, high reliability and long life. As one of the key equipment in this kind of processes, the ultra-high vacuum (UHV) furnace can perform heat treatment and brazing in a clean and high vacuum environment to achieve material degassing, purification and permanent connection. Its core performance is mainly reflected in the acquisition of high ultimate vacuum degree, uniform distribution of temperature in the furnace and reliability under high temperature conditions. In this paper, large metal sealed flange UHV furnace is designed for the development of high index, high reliability vacuum furnace products, and the intelligent processing and automatic production of the whole process is achieved.

Key words: metal seal, vacuum furnace, UHV, temperature uniformity