VACUUM ›› 2026, Vol. 63 ›› Issue (2): 47-54.doi: 10.13385/j.cnki.vacuum.2026.02.07
• Vacuum Technology Application • Previous Articles Next Articles
ZHANG Haotian1, JIN Hai2, YU Xiaoxue1, WANG Jiaxiang1, ZHAN Heng2, LI Kunzhao2, CHEN Zhou1
CLC Number: TB79
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