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VACUUM ›› 2020, Vol. 57 ›› Issue (1): 31-34.doi: 10.13385/j.cnki.vacuum.2020.01.06

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Effect of Ag Layer Thickness on Properties of AZO/Ag/AZO Transparent Conductive Films

LI Ming-liang1, LIU Li1, SHEN Yan2   

  1. 1.Chongqing Institute of Metrology and Quality Inspection, Chongqing 401120, China;
    2.Material Science and Engineering School, Kunming University of Science and Technology, Kunming 650093, China
  • Received:2019-02-21 Online:2020-01-25 Published:2020-03-17

Abstract: AZO/Ag/AZO multilayer transparent conductive films were grown on glass substrate by magnetron sputtering at room temperature. The effect of Ag layer thickness on the structure and properties of the multilayer transparent conductive films were mainly studied. The results show that AZO and Ag have preferred orientation to the (002) and (111) planes, respectively, and the resistivity of the multilayer transparent conductive films decrease with the increase of the Ag layer thickness, while the transmittance is reduced first, then increased, and then decreased. The sample with Ag layer thickness of 8nm shows the maximum figure of merit value of 33.1×10-3 Ω-1, and the overall performance was the best.

Key words: transparent conductive film, AZO/Ag/AZO, room temperature deposition

CLC Number: 

  • 0484.4
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