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VACUUM ›› 2020, Vol. 57 ›› Issue (1): 35-39.doi: 10.13385/j.cnki.vacuum.2020.01.07

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Development of All-glass Vacuum Heat Collector Coating Equipment

CHEN Zhi-tao   

  1. Dezhou Jinduo Vacuum Coating Technology Co., Ltd. Dezhou 253400, China
  • Received:2018-12-21 Online:2020-01-25 Published:2020-03-17

Abstract: This paper mainly introduces the development history of all-glass vacuum collector coating equipment, and describes the major improvements in the development process of collector coating equipment, as well as the methods of improving production efficiency and saving energy and reducing consumption of coating equipment. It has certain reference significance for the development and improvement of coating machines in other industries.

Key words: gradual collector film, interference collector film, directional sputtering target, weak magnet, three target coating machine

CLC Number: 

  • TB43
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