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VACUUM ›› 2020, Vol. 57 ›› Issue (2): 53-57.doi: 10.13385/j.cnki.vacuum.2020.02.10

• Measurement and Control • Previous Articles     Next Articles

Treatment of Inner Surface of Guide Sleeve with Inner Diameter of 20mm(1): Characteristics of Argon Hollow Cathode Discharge

YUE Ling1, SHI Yue-juan1, MA Yu-shan1, LIU Hai-bo1, ZHOU Yong-xing1*, ZHANG Ming-ming1, GONG Chun-zhi2*, TIAN Xiu-bo2   

  1. 1.Wuzhong Instrument Co., Ltd., Wuzhong 751100, China;
    2.State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China
  • Received:2019-05-05 Online:2020-03-25 Published:2020-04-24

Abstract: The influence of working pressure, pulse voltage and frequency on the volt-current characteristics of hollow cathode discharge in argon atmosphere was studied by using high frequency and high voltage pulse power supply for the inner surface treatment of 20mm guide sleeve of high-end valve. Discharge structures such as tube spacing and anode distance were also studied. The results show that the discharge of hollow cathode in tube needs a stable process, and the pulse current decreases gradually with the increase of time, and then reaches a stable discharge stage. The peak current of hollow cathode pulse increases with the increase of pulse voltage or working pressure. With the increase of pulse width or frequency, the peak current of the pulse does not change, but the average current increases, and the excitation time decreases with the increase of frequency. The analysis of discharge structure shows that the peak discharge current increases slightly with the decrease of tube spacing and the decrease of the distance between tube orifice and anode. The above results may provide effective guidance for the preparation of inner wall film such as small diameter guide sleeve of high-end valves.

Key words: guide sleeve, inner surface, hollow cathode, discharge

CLC Number: 

  • TB43
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