VACUUM ›› 2020, Vol. 57 ›› Issue (4): 6-10.doi: 10.13385/j.cnki.vacuum.2020.04.02
• Thin Film • Previous Articles Next Articles
LI Jian1,2, TONG Hong-hui1, DAN Min1, JIN Fan-ya1, WANG Kun1,2, CHEN Lun-jiang1
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