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VACUUM ›› 2020, Vol. 57 ›› Issue (6): 1-4.doi: 10.13385/j.cnki.vacuum.2020.06.01

• Thin Film •     Next Articles

Development of Hot Filament Chemical Vapor Deposition Equipment for Continuous Diamond Film Preparation

LIU Lu-sheng, ZHAI Zhao-feng, YANG Bing, SONG Hao-zhe, YU Qi, SHI Dan, YUAN Zi-yao, LU Zhi-gang, CHEN Bin, ZHOU Mei-qi, LI Hai-ning, YU Biao, HUANG Nan, JIANG Xin   

  1. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
  • Received:2020-09-07 Online:2020-11-25 Published:2020-11-30

Abstract: According to the current status of hot filament chemical vapor deposition(HFCVD) diamond film preparation equipment, most of the hot filaments are placed horizontally and are easily broken after carbonization and brittleness. Continuous preparation of CVD diamond films and low production costs cannot be achieved. It has shortcomings of high produce cost and low production efficiency. Based on the principle of HFCVD to prepare diamond films, using Solidwork three-dimensional design software for three-dimensional modeling, and combined with mechanical design software drawing, a type of diamond film continuous preparation HFCVD equipment was developed. The process flow of continuous is given, and diamond films with good quality are successfully grown in batches by using this equipment.

Key words: diamond film continuous preparation, HFCVD, coating process

CLC Number: 

  • TB79
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