热蒸发技术制备梯度折射率薄膜的研究*

doi:10.13385/j.cnki.vacuum.2022.06.04

Abstract

Abstract: The intermediate refractive index material required for preparing gradient refractive index films is obtained by adopting the method of dual-source co-evaporation of MgF₂ and ZnS and controlling the deposition rate ratio of both materials. The G|HL|A double-layer anti-reflection film is graded into 5 layers, and keeping the total optical thickness unchanged, the gradient index anti-reflection film with a gradient of 1.91,1.77, 1.64, 1.48, and 1.38(wavelength of 532nm) along the thickness direction is prepared. All samples are tested for optical and laser damage characteristics. The results show that the refractive index of the composite film obtained by double source co-evaporation of MgF₂ and ZnS and the deposition rate ratio of the two materials satisfy the relationship deduced according to Drude theory. The refractive index of the composite film accords with the normal dispersion. Except for the material with the refractive index of 1.91, of which the absorption is large(extinction coefficient at 532nm is 0.01), the other composites show small absorption(extinction coefficients at 532nm are less than 0.002). When all the monolayer films are irradiated with 100mJ energy laser, the composite film with the refractive index of 1.64 has the lowest laser damage, showing higher resistance to laser damage than single-component ZnS and MgF₂ films. When the double-layer anti-reflection film is equivalent to five layers with graded refractive index, the passband range is extended from 205nm to 380nm, and the laser damage threshold is increased from 2.0J/cm² to 3.7J/cm², which is increased by 85%. It can be seen that it is feasible to prepare thin films with graded refractive index by adjusting the evaporation rate ratio of the two materials. As long as the ratio of the two materials is appropriate, using co-evaporation technology can obtain a composite film that has higher resistance to laser damage than a single-component film. The graded index anti-reflection film has better optical properties and higher laser damage threshold than double-layer anti-reflection film.

Key words: graded refractive index, dual-source co-evaporation, anti-reflection film, composite film, LIDT

CLC Number:

O484

LIU Qi, XU Jun-qi, SU Jun-hong, HAN Gang, LI Yang, YUAN Song-song. Study on Gradient Index Films Prepared by Thermal Evaporation Technology[J].VACUUM, 2022, 59(6): 22-28.

References

[1] WANG C, WANG J, WANG J, et al.Optimal design and analysis of refractive index and thickness gradient optical films[J]. Results in Optics, 2021, 5: 100161.
[2] HE T J, WANG Y X, JIANG Y, et al.Fluorination-generated uninterrupted gradient-refractive index on commercial flexible substrates for high broadband and omnidirectional transmittance[J]. Applied Surface Science, 2019, 489: 494-503.
[3] JO G H, KIM S H, KOH J H.Enhanced electrical and optical properties based on stress reduced graded structure of Al-doped ZnO thin films[J]. Ceramics International, 2018, 44(1): 735-741.
[4] PU Y, MA P, LV L, et al.Enhanced thermomechanical stability on laser-induced damage by functionally graded layers in quasi-rugate filters[J]. Applied Surface Science, 2018, 440: 288-293.
[5] GOMEZ-VARELA A I, CASTRO Y, DURAN A, et al. Synthesis and characterization of erbium-doped SiO₂-TiO₂ thin films prepared by sol-gel and dip-coating techniques onto commercial glass substrates as a route for obtaining active gradient-index materials[J]. Thin Solid Films, 2015, 583: 115-121.
[6] QIAO Z,MA P, LIU H, et al.Laser-induced damage of rugate and quarter-wave stacks high reflectors deposited by ion-beam sputtering[J]. Optical Engineering, 2013, 52(8): 086103.
[7] KITAMURA S, KANNO Y, WATANABE M, et al.Films with tunable graded refractive index consisting of spontaneously formed mesoporous silica nanopinnacles[J]. ACS Photonics, 2014, 1(1): 47-52.
[8] MIYATA H, KITAMURA S, WATANABE M, et al.Films consisting of innumerable tapered nanopillars of mesoporous silica for universal antireflection coatings[J]. Chemistry An Asian Journal, 2016, 11(10): 1618-1623.
[9] WANG Q, LIM K P, NG D.Graded refractive index optics based on dual-layer ultrathin films: theory, design and applications in integrated photonics[C]//Proceedings of SPIE-The International Society for Optical Engineering. San Francisco: SPIE, 2015, 9366: 93660K.
[10] MON-PEREZ E, DUTT A, SANTOYO-SALAZAR J, et al.Double stack layer structure of SiN_x/pm-Si thin films for downshifting and antireflection properties[J]. Materials Letters, 2017, 203: 50-53.
[11] TIAN L, LI L, BAN C C, et al.Fabrication and characterisation of TiO₂ anti-reflection coatings with gradient index[J]. Micro & Nano Letters, 2017, 12(11): 849-853.
[12] YAN G H, YUAN Y, HONG R J.Preparation of broadband antireflective coatings with ultra-low refractive index layer by sol-gel method[J]. Construction and Building Materials, 2018, 176: 75-80.
[13] 龚勋, 杭凌侠, 黄发彬. 1550nm陷波滤光片制备工艺技术研究[J]. 应用光学, 2016, 37(1): 118-123.
[14] ZHANG W N, HU K, TU J L, et al.Broadband graded refractive index TiO₂/Al₂O₃/MgF₂ multilayer antireflection coating for high efficiency multi-junction solar cell[J]. Solar Energy, 2021, 217: 271-279.
[15] XIONG C, XU W L, ZHAO Y, et al.New design graded refractive index antireflection coatings for silicon solar cells[J]. Modern Physics Letters B, 2017, 31(19/20/21): 1740028.
[16] 卢权, 唐振方. 渐变折射率减反膜的设计及其全向性能[J]. 光学技术, 2015, 41(4): 305-308.
[17] 沈自才, 王英剑, 范正修, 等. 双源共蒸法制备非均匀膜的模型分析[J]. 物理学报, 2005, 54(1): 295-301.
[18] ISO. Laserand laser-related equipment—determination of laser-induced damage threshold of optical surface—part 1: 1-on-1 test: ISO 11254-1: 2000[S]. Switzerland: [s.n.], 2000.
[19] 徐均琪, 杭良毅, 苏俊宏, 等. LaTiO₃薄膜的光学及激光损伤特性[J]. 真空科学与技术学报, 2015, 35(9): 1124-1129.
[20] 唐晋发, 顾培夫, 刘旭, 等. 现代光学薄膜技术[M]. 浙江: 浙江大学出版社, 2006: 492.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2]	ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3]	LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4]	ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6]	SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8]	JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .

Study on Gradient Index Films Prepared by Thermal Evaporation Technology

Abstract

Cite this article

share this article

References

Related Articles 2

Metrics

Comments

Recommended 10

[1]	WU Le-yu. Applicability Research of Different High Barrier Composite Films on VIP with Groove [J]. VACUUM, 2020, 57(1): 62-66.
[2]	XU Jun-qi, LI Hou-jun, LI Mian, WANG Jian, SU Jun-hong, GOLOSOV Dmitriy A.. Optical and laser damage characteristics of TiO₂ films prepared by thermal evaporation deposition technique [J]. VACUUM, 2019, 56(1): 39-44.