减摩耐磨高性能TiCN薄膜工艺优化及性能研究

doi:10.13385/j.cnki.vacuum.2025.06.01

Abstract

Abstract: Based on the orthogonal test method of four factors and three levels, TiCN films were prepared on Cr12MoV die steel under different process parameters using PVD multi-function ion coating machines. The effects of different process parameters on mechanical and friction performance of TiCN thin films were studied, and the preparation process parameters of the film were optimized. The results show that the influence weight of factors on the bonding force of TiCN thin films is methane and nitrogen flow ratio > arc current> total gas flow> partial pressure, and the influence weight of factors on the hardness is methane and nitrogen flow ratio> total gas flow> partial pressure> arc current. The methane and nitrogen flow ratio affects the mechanical properties of TiCN films mainly by changing the carbon content. The TiCN film obtained by the process scheme with the bonding force as the index has the best performance, and the process parameters are the total gas flow of 450 sccm, methane and nitrogen flow ratio of 5∶1, partial pressure of 200 V, and current of 60 A. The hardness value of as-prepared TiCN film is 3 456.76 HV, the binding force is 36.7 N, and the average friction coefficient is 0.281 3, which significantly improves the anti-wear performance of the substrate.

Key words: TiCN thin film: orthogonal test, carbon content, mechanical property, reduction and wear resistance

CLC Number: TB43

YU Peng, HE Qing, YUAN Tao, WANG Shixin, LIU Guixin. Study on Fabrication Process Optimization and Performance of Decreasing Wear-Resistant High Performance TiCN Thin Film[J].VACUUM, 2025, 62(6): 1-8.

References

[1] SCHALK N, TKADLETZ M, MITTERER C.Hard coatings for cutting applications: physical vs. chemical vapor deposition and future challenges for the coatings community[J]. Surface & Coatings Technology, 2022, 429: 127949.
[2] OLIVER J N, SU Y C, LU X N, et al.Bioactive glass coatings on metallic implants for biomedical applications[J]. Bioactive Mateials, 2019, 4: 261-270.
[3] 周颐辛, 祝新发, 张晶晶, 等. 离子镀TiCN和TiN工具涂层的微结构与切削性能[J]. 工具技术, 2010, 44(11): 18-21.
[4] DENG Y, CHEN W L, LI B X, et al.Physical vapor deposition technology for coated cutting tools: a review[J]. Ceramics International, 2020, 46: 18373-18390.
[5] WANG S, MA C, WALSH F C.Alternative tribological coatings to electrodeposited hard chromium: a critical review[J]. Transactions of the IMF, 2020, 98(4): 173-185.
[6] DE FIGUEIREDO M R, NEIDHARDT J, KAINDL R, et al. Formation mechanisms of low-friction tribo-layers on arc-evaporated TiC₁-_xN_x hard coatings[J]. Wear, 2008, 265(3): 525-532.
[7] GHAILANE A, MAKHA M, LARHLIMI H, et al.Design of hard coatings deposited by HiPIMS and dcMS[J]. Materials Letters, 2020, 280: 128540.
[8] KOIKE M, CAI Z, FUJII H, et al.Corrosion behavior of cast titanium with reduced surface reaction layer made by a face-coating method[J]. Biomaterials, 2003, 24(25): 4541-4549.
[9] ZLAMAL T, MRKVICA I, SZOTKOWSKI T, et al.The influence of surface treatment of PVD coating on its quality and wear resistant[J]. Coatings, 2019, 9(7): 439.
[10] MATTOX D M.Physical vapor deposition (PVD) processes[J]. Metal Finishing, 2002, 100: 394-408.
[11] 李雪萍. 硬质合金上先进PVD技术沉积 TiN基硬质膜及其性能研究[D]. 广州: 华南理工大学, 2016.
[12] 黄珂. TiN涂层和TiAlN涂层结合强度及抗氧化性能的研究[D].长沙:中南大学,2014.
[13] 折洁, 张程煜, 张贝贝, 等. 真空多弧离子镀制备Ti(CN)涂层及其性能研究[J]. 材料导报, 2013, 27(4): 12-15.
[14] YASUOKA M, WANG P P, MURAKAMI R.Comparison of the mechanical performance of cutting tools coated by either a TiC_xN₁-_x single-layer or a TiC/TiC_0.5N_0.5/TiN multilayer using the hollow cathode discharge ion plating method[J]. Surface & Coatings Technology, 2012, 206(8/9): 2168-2172.
[15] CHEN R, TU J P, LIU D G, et al.Microstructure, mechanical and tribological properties of TiCN nan DC magnetron sputtering[J]. Surface & Coatings Technology, 2011, 205(21/22): 5228-5234.
[16] CHENG Y H, BROWNE T, HECKERMAN B, et al.Influence of the C content on the mechanical and tribological properties of the TiCN coatings deposited by LAFAD technique[J]. Surface & Coatings Technology, 2011, 205(16): 4024-4029.
[17] DANIŞMAN Ş, ODABAŞ D, TEBER M. The effect of TiN, TiAlN, TiCN thin films obtained by reactive magnetron sputtering method on the wear behavior of Ti6Al4V alloy: a comparative study[J]. Coatings, 2022, 12(9): 1238.
[18] MADEJ M, PIOTROWSKA K.Characterisation of TiCN coatings for biomedical applications[J]. Coatings, 2024, 14(6): 775.
[19] WANG Y F, LI Z X, WANG H N.Effect of multilayered structure on properties of Ti/TiN coating[J]. Rare Metal Materials and Engineering, 2017, 46(5): 1219-1224.
[20] CHENG Y H, BROWNE T, HECKERMAN B.Nanocomposite TiSiN coatings deposited by large area filtered arc deposition[J]. Journal of Vacuum Science & Technology A, 2010,28(1): 82-88.
[21] CHENG Y H, BROWNE T, HECKERMAN B.TiCN coatings deposited by large ares filtered arc deposition technique[J]. Journal of Vacuum Science & Technology A, 2010,28(3): 431-437.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2]	ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3]	CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[4]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[5]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
[6]	XU Fa-jian, WANG Hai-lei, ZHAO Cai-xia, HUANG Zhi-ting. Application of chemical gases vacuum-compression recovery system in environmental engineering[J]. VACUUM, 2018, 55(5): 29 -33 .
[7]	XIE Yuan-hua, HAN Jin, ZHANG Zhi-jun, XU Cheng-hai. Discussion on present situation and development trend of vacuum conveying[J]. VACUUM, 2018, 55(5): 34 -37 .
[8]	SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[9]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[10]	CHANG Zhen-dong, MU Ren-de, HE Li-min, HUANG Guang-hong, LI Jian-ping. Reflectance spectroscopy study on TBCs prepared by EB-PVD[J]. VACUUM, 2018, 55(5): 46 -50 .

Study on Fabrication Process Optimization and Performance of Decreasing Wear-Resistant High Performance TiCN Thin Film

Abstract

Cite this article

share this article

References

Related Articles 5

Metrics

Comments

Recommended 10

[1]	GUO Maomao, XIE Min, WANG Zhigang, MU Rende, SONG Xiwen, ZHANG Yonghe. Microstructure and Mechanical Properties of Sc₂O₃-Y₂O₃-ZrO₂ Ceramic Materials for Thermal Barrier Coating [J]. VACUUM, 2025, 62(5): 39-43.
[2]	CHEN Ming, LI Xiangcai, ZHANG Xiaomin, HUANG Shuo, WANG Chong, HU Jun. Effect of P on the as Cast Microstructure and Mechanical Properties of Nickel Based Superalloy [J]. VACUUM, 2025, 62(2): 91-99.
[3]	ZHAO Zhen-yun, CHEN Ding-jun, GUO Yuan-meng, YANG Hao, DONG Shuai, SUN Tie-sheng, HUANG Mei-dong. Hydrophobic Properties of Chromium Nitride Thin Films at Different Temperatures [J]. VACUUM, 2024, 61(1): 27-33.
[4]	LIU Yang, ZHANG Ya-nan, GAO Sheng-yuan, ZHAO Zhen-yun, ZHENG Ming-hao, HUANG Mei-dong. Research on Mechanical Properties of Zr/ZrN Multilayers by Multi-arc Ion Plating [J]. VACUUM, 2022, 59(5): 28-31.
[5]	LV Qian-qian, SUN Zhen-chuan, ZHOU Jian-jun, YANG Zhen-xing, CHEN Rui-xiang, YOU Hui-jie. Laboratory Experiment on the System Performance of Low Vacuum Piping [J]. VACUUM, 2021, 58(3): 7-12.