多弧离子镀Zr/ZrN多层膜的力学性能研究*

doi:10.13385/j.cnki.vacuum.2022.05.05

Abstract

Abstract: The multi-arc ion plating method was adopted to prepare ZrN single-layer films and Zr/ZrN multilayers with different modulation ratios, respectively, and the effects of modulation ratio on mechanical properties of the multilayers were studied. X-ray diffractometer, scanning electron microscopy and micro-indenter were used to characterize the phase structure, surface morphology, hardness and adhesive strength of the films. The results show that the ZrN layer within the multilayers has higher crystallinity. Surface morphology of the films is flat, and microstructure of the surface is dense. Some spherical Zr particles are distributed on the surface. Hardness of the Zr/ZrN multilayers is higher than that of the single ZrN film, and it first increases and then decreases with the modulation ratio. When the modulation ratio is 1∶1, hardness of the Zr/ZrN multilayers reaches 1541.58 Hv, while the adhesive strength is 51.61N.

Key words: multi-arc ion plating, modulation ratio, ZrN, Zr/ZrN multilayers, mechanical property

CLC Number:

TB43

LIU Yang, ZHANG Ya-nan, GAO Sheng-yuan, ZHAO Zhen-yun, ZHENG Ming-hao, HUANG Mei-dong. Research on Mechanical Properties of Zr/ZrN Multilayers by Multi-arc Ion Plating[J].VACUUM, 2022, 59(5): 28-31.

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Research on Mechanical Properties of Zr/ZrN Multilayers by Multi-arc Ion Plating

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