VACUUM ›› 2026, Vol. 63 ›› Issue (1): 1-8.doi: 10.13385/j.cnki.vacuum.2026.01.01
• Thin Film • Next Articles
ZHU YuQuan1, ZHANG ZhiXuan1, ZHANG Jing1, WU JinLong1, WANG WeiChang1, LIAN ShuiYang1
CLC Number: TN305.8
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