： Research and development of atomic layer deposition has attracted considerable attention owing to the evolution of semiconductor processes towards smaller nodes and higher precision. In this study, a large-area microwave plasma-enhanced atomic layer deposition system was successfully developed, consisting of several major modules: vacuum, microwave transmission, gas supply and control. The system has successfully achieved high-density plasma excitation and highly reactive radicals generation, as demonstrated by the results of microwave transmission simulation and optical emission spectroscopy. A shorter one-cycle time of 14 s and a higher intensity O* radical emission intensity of 15 769 a.u. were realized by tuning microwave powers (400-1 000 W) and oxygen flow rates (10-100 sccm). The as-deposited 8-inch Al₂O₃ films exhibited extremely low non-uniformity of 0.88%, a refractive index of 1.65 at 632.8 nm (with a near-zero extinction coefficient), a high dielectric constant of 9.3, and a large breakdown field of 23.6 MV/cm, respectively. The microwave plasma atomic layer deposition system possesses outstanding compatibility with large-size wafers and high-quality film deposition, serving as a powerful equipment for applications in advanced semiconductor processes and integrated circuit manufacturing.

： To improve the precision and sensitivity of CO₂ gas detection in the mid-wave infrared, a high-performance mid-wave infrared narrowband filter was developed. The blue sapphire was used as the substrate material, and Ge and ZnS materials were used to construct the film layer. The film system structure was optimized by the equivalent impedance matching design method. At the same time, the sensitive layer segmentation control technology and the proportional factor differential control of the film thickness were introduced to effectively solve the high-precision control problem in the infrared waveband. The test results show that the final product has a center wavelength of 4 269 nm, a peak transmission rate of 89.7%, a passband half-width of 126 nm, and an average cutoff depth of OD2.83 from 2-15 μm. The as-developed infrared narrowband filter can effectively improve the detection accuracy of gases and provide strong support for the progress of gas detection technology.

Physical vapor deposition, as a clean and efficient coating method, is considered to be the best choice for preparing ceramic coatings. Different preparation methods influence the structure and performance of the film. In this paper, TiN coatings were prepared by high-power pulsed magnetron sputtering (HiPIMS) technology and self-developed composite magnetic field arc ion plating (AIP), and the microstructure, mechanical properties, friction performance, and electrochemical corrosion behavior of the coatings were studied. The results show that the coating prepared by HiPIMS is more denser and the nano-hardness is 30.8 GPa. The polarization resistance of the coating deposited by HiPIMS is about one order of magnitude higher than that of AIP film under the same test conditions. The AIP coating shows higher elastic modulus of 575.5 GPa, and the lowest friction coefficient of the coating under atmospheric conditions is 0.42.

Fan-out panel-level packaging （FOPLP） technology demonstrates significant advantages in heterogeneous chip integration and cost reduction, yet the increase in substrate size exacerbates the thermal stress warpage. Aimed at the heating and cooling processes of large-size glass substrates in vacuum chambers, a series of validation experiments were designed to investigate the effects of different pressure conditions （10^-3, 20, 100 and 10⁵ Pa） and N₂ gas flow assistance on the thermal behavior and temperature distribution of the substrates. The results show that under the same heating parameters and duration, the lower degas chamber pressure causes slower substrate heating rate and larger temperature difference between the center and the corner, while the opposite trend is observed during the cooling process. When the chamber pressure is approximately 100 Pa, the substrate surface provides the most stable heating condition. Introducing a low flow rate of N₂ at 100 Pa can improve the heating and cooling efficiency, and maintain the the edge and the center temperature difference at 5-10 ℃.

This paper studies and analyses the current status of Raman spectroscopy-related standard systems domestically and internationally, involving 42 current domestic standards, including 13 national standards, 15 industry standards, 4 local standards, 10 group standards. It involves 17 current international standards, including 8 ASTM International (American Society for Testing and Materials International) standards, 6 IEC (International Electrotechnical Commission) standards and 3 ISO (International Organization for Standardization) standards. Focusing on the content of the current relevant standards, the standardisation differences at home and abroad and the integration of standards were discussed. Finally, it summarizes the current standardisation system of Raman spectroscopy technology and looks forward to the future development direction, aiming to provide reference for the continuous improvement of the subsequent standardisation system and the research in related fields.

AZO thin films were sputtered on quartz glass substrate by dual-target magnetron sputtering technique. By adjusting the key process parameters such as sputtering power, sputtering pressure and substrate temperature, the specific effects of these parameters on the transmittance and conductivity of AZO thin films were studied in depth. The ATO film was characterized and analyzed by ultraviolet spectrophotometer and four-probe tester. The results show that the transmittance and resistivity of the films gradually decrease with the increase of sputtering power, the best transmittance is achieved at 30 W sputtering power, and the lowest resistivity is achieved at 50 W sputtering power of aluminum target. With the increase of sputtering gas pressure, the film transmittance and resistivity firstly increase and then decrease, and the best transmittance of AZO film in the visible light range reaches more than 90% at 0.7 Pa sputtering gas pressure, and the lowest resistivity is 43 Ω·cm at 1.0 Pa sputtering gas pressure. The best performance of the films is achieved at a substrate temperature of 250 ℃, with an average transmittance of 87% in the visible range and a resistivity of 38 Ω·cm.

This study focuses on the efficient and energy-saving operation of screw vacuum pumps. Starting from the fundamental theory of power consumption calculation in screw vacuum pumps, the useful power required during the pumping process of the screw rotor is divided into internal compression power and external compression power (i.e., exhaust power), with corresponding formulas provided for each. Based on this, several common methods for reducing power consumption and achieving energy-efficient operation were introduced, including using a screw rotor with high compression ratio to reduce the exhaust volume, thereby lowering external compression power consumption; installing a small vacuum pump at the exhaust port to create a lower exhaust pressure, thus reducing external compression power; and to prevent excessive internal compression power in high-compression-ratio screw rotors under high inlet pressure, adopting variable frequency speed reduction (though this results in reduced pumping speed) and installing an intermediate pressure relief valve.

This work presents the design of a compact embedded 2.45 GHz ECR ion source, including the microwave feed, plasma chamber and the extraction electrode. The overall size of the source is Φ200 mm×178 mm, with a plasma chamber size of Φ30 mm×50 mm. The design parameters of extraction voltage and hydrogen ion current are 50 kV and 20 mA, respectively. The feasibility of the design is verified by simulation. Flow field simulations show that the tri-electrode extraction structure can achieve a 20 mA extracted ion beam at 50 kV, with a beam divergence angle below 1.2×10^-3 rad. The electric field magnitude reaches 4.17 kV/mm under a 50 kV voltage, which is below the breakdown threshold 10 kV/mm of Al₂O₃ material. Thermal simulation results indicate that the as-designed water-cooling structure significantly reduces the maximum surface temperature of the cavity. Simulation results show that the maximum stress of the ceramic chamber is 2.38 MPa under atmospheric pressure with an internal vacuum, which is less than the yield strength (160 MPa) of the Al₂O₃ ceramic material. Based on these results, an ECR ion source system was developed, achieving initial experimental results. Under a vacuum pressure of 5.7×10^-5 Pa, the ceramic cavity did not experience breakdown, and the system demonstrated resistance to voltages exceeding 50 kV. At present, the system successfully outputs a 9 mA hydrogen ion beam at 25 kV.

Traditional indirect measurement methods of vacuum degree may introduce additional errors due to the coupling of multiple physical processes, resulting in low accuracy of the vacuum degree measurement. Thus, a vacuum monitoring method for high-voltage power circuit breakers based on laser-induced plasma is proposed. Firstly, by using ultrafast laser-induced breakdown spectroscopy technology, high-energy laser pulses are focused on the gap area of the circuit breaker contacts to bombard the shielding cover of the high-voltage power circuit breaker, thereby the laser plasma is induced. Subsequently, characteristic parameters of the plasma such as radial emissivity, temperature, and feather length are extracted. Finally, the relationship between three characteristic parameters and vacuum degree is obtained through experiments. The results show that this method can effectively extract plasma radial emissivity, temperature, and feather length characteristic parameters, and accurately monitor the vacuum degree of circuit breakers.

The coil power supply provides the desired magnetic confinement field environment for the nuclear fusion device to achieve plasma configuration control. In this work, a fast-response and fast-tracking bipolar output system based on the coil power supply was developed and designed. The aim was to enable the coil power supply to achieve high-power bipolar output while meeting the requirements of high output current change rate, fast response speed, strong tracking ability, no overshoot, high precision, and strong stability. This study mainly designed the IGBT connection design of hardware main loop and the fuzzy model predictive adaptive controller of software. The design has been experimentally proven on the coil power supply of the reversed-field pinch fusion device. It can achieve high-power and bipolar output of the coil power supply, with fast response speed, strong tracking ability, and high precision, and can operate stably for a long time. It can meet the high-power and high-speed requirements of devices in the fusion field and plasma application fields.

Addressing the common challenge of microscale gas leakage at sealing interfaces of mining equipment under low vacuum conditions, this study analyzes the failure mechanisms of sprocket seals in vacuum environments. A microscale leakage mathematical model considering interface roughness, material elasticity, and rarefied gas slip flow is developed, revealing the transmission characteristics and nonlinear evolution of gas under vacuum pressure gradients. Using FEA-CFD coupled simulation, the stress distribution, flow field evolution, and leakage path dynamics of the seal are investigated under load disturbances and pressure gradients. The study results show that, at a vacuum level of 5 kPa, a compressive force of 1 000 N, and a roughness of 0.8 μm, the lubricant vapor leakage is 1.62 mL/min, 37.9% lower than that of the conventional structure, indicating a significant performance improvement. Further analysis reveals that material modulus, interface morphology, and vacuum rarefaction effects are decisive factors in determing sealing reliability. The findings not only enhance understanding of gas-solid coupling in vacuum seals but also provide theoretical and engineering guidance for advancing vacuum sealing technology and optimizing vacuum equipment design.

Excessive contact temperature can directly affect the performance of vacuum circuit breakers, reducing their opening and closing speed and insulation performance, which in tum leads to an increase in the failure rate of vacuum circuit breakers. Therefore, in response to the difficulty of monitoring the temperature rise of contacts in vacuum environments, this study proposed a method for measuring the temperature of contacts in the arc extinguishing chamber for high-voltage vacuum circuit breakers. Firstly, we used an infrared thermometer to monitor the current contact temperature in the arc extinguishing chamber of the high-voltage vacuum circuit breaker, and then corrected the infrared temperature based on the environmental temperature measured by emissivity and fiber Bragg grating temperature sensors. Then, we established a mathematical model for the dynamic temperature rise of the contact, and ANSYS Workbench simulation software was used to perform multiphysics field coupling solution to obtain simulation results, such as the contact temperature distribution and temperature rise rate. The results show that, with the increase of time, the temperature measurement error of the studied method does not show a significant increasing trend, indicating that the method can maintain high stability and accuracy in the long-term temperature measurement process.

A dual-vacuum heat treatment furnace design scheme has been proposed for dedicated materials in the nuclear industry, which simultaneously addresses the special requirements of preventing workpiece contamination during heating and maintaining strict thermal environment control in precision production workshops. The overall structural design of the dual-vacuum heat treatment furnace is introduced, with emphasis on the solution proposed to accommodate the thermal expansion and elongation of the muffle furnace tube within the heating chamber. A dual-vacuum system has been constructed, and numerical simulation analysis along with on-site experimental validation has been conducted for the heating chamber. Both the experimental and simulation results indicate that the temperature and uniformity of the designed dual-vacuum heat treatment furnace meet the process requirements. Test results show that key indicators such as vacuum pressure, pump-down efficiency, and cooling efficiency all meet the process specifications. The development of this equipment provides a scientific basis and practical guidance for the design of similar apparatus.

As the core component of the electron beam melting system, the evaporator relies on bellows for connections at critical points in its water circuit,which experience bending failure during operation. This paper conducts a failure analysis on the existing bellows A used in the evaporator. Based on design specifications, the bellows structure is optimized, completing design calculations for pressure resistance, fatigue life, stiffness, and stability. A numerical simulation model was established to perform finite element analysis on stress, deformation, and internal flow resistance. Ultimately, two optimized structures, bellows B and C, are determined. Simultaneously, the type tests were performed on bellows B and C to verify the sealing, pressure resistance, stiffness, stability, and fatigue life. The final results indicate that both redesigned bellows meet design requirements, demonstrating excellent overall performance.

The influence of human perceived comfort and climate zoning on passive ultra-low energy building design was explored, and the application of vacuum technology was deeply analyzed. GIS technology was used to analyze the adaptability of Chinese residents to comfortable temperature in different regions and seasons, and the human climate adaptation model of four major climate zones was constructed. The technical parameters of vacuum insulation materials were initialized and their performance was described. Based on the results of climate zoning, the application strategy of vacuum glass and insulation board was planned, and the combination of them and other energy-saving technologies was discussed. The results show that vacuum technology can significantly reduce building energy consumption and improve living comfort, especially in extreme weather conditions. The performance is stable and durable, which provides strong support for green buildings and low-carbon life.

Complex foundation includes conditions such as weak layer, karst area and variable geological structure. This type of foundation has problems such as heterogeneity of geological structure, uncertainty of stratum change and high groundwater level. As the key technology of deep foundation pit excavation, the stability of pile-anchor support plays a decisive role in engineering safety. To ensure the safety of deep foundation pit excavation, it is of great significance to study the numerical simulation method for the stability of deep foundation pit excavation under complex foundation conditions. Taking the deep foundation pit excavation project in a city commercial complex project as a research case, and based on the analysis of the geological conditions and soil characteristics of the deep foundation pit, the three-pile anchor support scheme and the corresponding application parameters are determined. Combined with the vacuum well point dewatering method, the vacuum pump is used to form a negative pressure in the well point tube to reduce the groundwater level. By improving the soil parameters of Mohr-Coulomb constitutive model, the element simulation properties of each structure of pile-anchor support are defined. Taking ten groups of working conditions as the boundary conditions of numerical simulation, the relevant numerical simulation under complex foundation conditions is completed. The results show that the change rate of pile top horizontal displacement is fast during excavation, and the horizontal displacement of pile top gradually increases with the advance of working conditions, but the horizontal displacement after stability is within the warning value. The soil excavation method of pile-anchor support has little influence on the surrounding strata, and the maximum settlement displacement value is also within the warning value, which has a certain stable excavation effect.