真空环境下材料放气行为研究进展*

doi:10.13385/j.cnki.vacuum.2026.03.01

Abstract

Abstract: The outgassing behavior of materials under vacuum environments represents one of the primary gas sources in high and ultra-high vacuum systems, significantly affecting the time required to achieve vacuum, the ultimate pressure, and the composition of residual gases in vacuum chambers. The performance of a vacuum system is closely related to the outgassing properties of the materials used, which in turn depend on a variety of factors including material type, production processes, surface conditions, microstructure, and external environmental factors. This review summarizes the outgassing mechanisms, influencing factors, and measurement techniques of materials in vacuum, discusses the effects of surface modification technologies-widely used in vacuum devices-on material outgassing behavior, and investigates the underlying mechanisms involved. Furthermore, this paper explores changes in material outgassing behavior and the corresponding mechanisms under the influence of physical fields such as high-energy particle irradiation, mechanical stress, and electric fields, thereby providing a theoretical basis and technical reference for the optimized design and engineering application of vacuum equipment.

Key words: outgassing, vacuum, particle-induced desorption, mechanically-induced desorption, surface modification

CLC Number: TB74

SI Huiling, LUO Yan, ZHENG Longhui, WANG Kuibo, WU Xiaobin. Advances in Research on Material Outgassing Behavior under Vacuum Environments[J].VACUUM, 2026, 63(3): 1-15.

References

[1] 达道安. 真空设计手册第3版[M]. 北京: 国防工业出版社, 2004.
[2] 张以忱. 真空材料[M]. 北京: 冶金工业出版社, 2005.
[3] MINATO M, ITOH Y.Vacuum characteristics of titanium[J]. Journal of Vacuum Science & Technology A, 1995, 13(3): 540-544.
[4] RAITERI G, CALCATELLI A.Thermal desorption from stainless steel samples coated with TiN and oxide layers[J]. Vacuum, 2001, 62(1): 7-14.
[5] 陈蕾, 肖梅, 张晓兵, 等. 导线在真空环境中的放气特性分析[J]. 真空与低温, 2016, 22(2): 100-103.
[6] 代彦伟, 肖梅, 张晓兵, 等. 基于四极质谱仪O形氟橡胶圈的放气研究[J]. 真空与低温, 2016, 22(3): 170-172.
[7] HIROTA K, KOMATSU W.Concurrent Measurement of Volume, Grain-Boundary, and Surface Diffusion Coefficients in the System NiO-Al₂O₃[J]. Journal of the American Ceramic Society, 1977, 60(3-4): 105-107.
[8] MISHIN Y, ASTA M, LI J.Atomistic modeling of interfaces and their impact on microstructure and properties[J]. Acta Materialia, 2010, 58(4): 1117-1151.
[9] BRASS A M, CHANFREAU A.Accelerated diffusion of hydrogen along grain boundaries in nickel[J]. Acta Materialia, 1996, 44(9): 3823-3831.
[10] HARRIS T M, LATANISION M.Grain boundary diffusion of hydrogen in nickel[J]. Metallurgical Transactions A, 1991, 22(2): 351-355.
[11] YAO J, MEGUID S A, CAHOON J R.Hydrogen diffusion and its relevance to intergranular cracking in nickel[J]. Metallurgical Transactions A, 1993, 24(1): 105-112.
[12] OUDRISS A, CREUS J, BOUHATTATE J, et al.Grain size and grain-boundary effects on diffusion and trapping of hydrogen in pure nickel[J]. Acta Materialia, 2012, 60(19): 6814-6828.
[13] LEE J Y, LEE S M.Hydrogen trapping phenomena in metals with B.C.C. and F.C.C. crystals structures by the desorption thermal analysis technique[J]. Surface and Coatings Technology, 1986, 28(3): 301-314.
[14] CHESSER I, MISHIN Y.Point-defect avalanches mediate grain boundary diffusion[J]. Communications Materials, 2022, 3(1): 1-10.
[15] HE Q S, SUN T Y, HUANG L F.Chemical-bonding and lattice-deformation mechanisms unifying the stability and diffusion trends of hydrogen in TiN and AlN polymorphs[J]. Acta Materialia, 2024, 281: 120447.
[16] WU S P, CAI X L, ZHOU L.Improvement of Hydrogen Absorption and Desorption Kinetics of Metallic Magnesium by Mechanical Activation[J]. Transactions of the Indian Institute of Metals, 2023, 76(7): 1959-1966.
[17] GORTAT D, MURRAY P T, FAIRCHILD S B, et al.Laser surface melting of stainless steel anodes for reduced hydrogen outgassing[J]. Materials Letters, 2017, 190: 5-8.
[18] IWAOKA H, ARITA M, HORITA Z.Hydrogen diffusion in ultrafine-grained palladium: Roles of dislocations and grain boundaries[J]. Acta Materialia, 2016, 107: 168-177.
[19] MATSUMOTO N, WATANABE T, KATO K.Effect of moisture adsorption/desorption on external cylinder surfaces: influence on gravimetric preparation of reference gas mixtures[J]. Accreditation and Quality Assurance, 2005, 10(7): 382-385.
[20] BUTT H J, GRAF K, KAPPL M.Physics and Chemistry of Interfaces[M]. Wiley-VCH Verlag GmbH, 2013.
[21] BRANCHER R D, STEFANOV S, GRAUR I, et al.A kinetic model for gas adsorption-desorption at solid surfaces under non-equilibrium conditions[J]. Vacuum, 2020, 174: 109166.
[22] LUO Y, WU X B, WANG K B, et al.Comparative study on surface influence to outgassing performance of aluminum alloy[J]. Applied Surface Science, 2020, 502: 144166.
[23] LUO Y, WANG K B, WU X B.Research on the effect of density on the outgassing characteristics of ceramics[J]. Journal of Testing and Evaluation, 2023, 52(1): 534-544.
[24] MEI Z W, BI H L, CAO Q, et al.A modified pump-down model for high vacuum packaging of vacuum insulation sandwiches under readsorption effect[J]. Vacuum, 2023, 211: 111958.
[25] MEI Z W, BI H L, CAO Q, et al.Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect[J]. Journal of Vacuum Science & Technology B, 2023, 41(5): 054202.
[26] 王毅, 郭兴, 王先荣, 等. 质子辐照引起的质量损失模型及实验验证[J]. 真空与低温, 2015, 21(3): 161-164, 145.
[27] 罗艳, 王魁波, 吴晓斌, 等. 电镀件的真空放气特性研究[J]. 真空科学与技术学报, 2022, 42(8): 578-583.
[28] MEI Z W, BI H L, LUO Y, et al.Modeling of intrinsic photon-stimulated desorption yields under readsorption effect[J]. Vacuum, 2023, 216: 112438.
[29] 张涤新, 曾祥坡, 冯焱, 等. 材料放气率测量方法评述[J]. 真空, 2010, 47(6): 1-5.
[30] LUO Y, WU X B, WANG K B, et al.Comparative study on the outgassing rate of materials using different methods[J]. Mapan, 2016, 31(1): 61-68.
[31] SCHINDLER N, SCHLEUβNER D, EDELMANN C. Measurements of partial outgassing rates[J]. Vacuum, 1996, 47(4): 351-355.
[32] 冯焱, 董猛, 吴晓斌, 等. 基于分压力测量的真空材料放气率测试方法研究[J]. 真空, 2013, 50(4): 49-52.
[33] 罗艳, 王魁波, 张罗莎, 等. 聚合物的放气分率与放气模型研究[J]. 真空科学与技术学报, 2015, 35(9): 1100-1104.
[34] 张罗莎, 王魁波, 吴晓斌, 等. 一种材料分压放气率测试装置及方法: CN105021494A[P].2015-07-20.
[35] 罗艳, 吴晓斌, 王魁波, 等. 一种材料辐射致放气的在线测试装置和测试方法: CN106814125A[P].2016-12-08.
[36] 罗艳, 王魁波, 吴晓斌. 极紫外光刻机真空材料放气分率的单质谱测试方法研究[J]. 质谱学报, 2018, 39(4): 392-398.
[37] 罗艳, 王魁波, 吴晓斌, 等. 高精度真空材料放气测试研究[J]. 真空科学与技术学报, 2016, 36(3): 251-257.
[38] 王星辉, 成永军, 董猛, 等. 基于四极质谱计质量歧视效应修正的材料C_xH_y放气率测试方法研究[J]. 真空科学与技术学报, 2023, 43(11): 938-946.
[39] WÓJCIK L, BEDERSKI K. Determination of the ion transmission coefficient for a mass spectrometer with a quadrupole ion analyzer[J]. International Journal of Mass Spectrometry and Ion Processes, 1996, 153(2): 139-144.
[40] ZHANG X D, HONDA M, HAMILTON D.Performance of the high resolution, multi-collector helix MC plus noble gas mass spectrometer at the Australian National University[J]. Journal of the American Society for Mass Spectrometry, 2016, 27(12): 1937-1943.
[41] ZHANG X D, HONDA M.Minimisation of pressure dependent mass discrimination in the ion source of the helix MC plus noble gas mass spectrometer[J]. Chemical Geology, 2017, 473: 50-54.
[42] WANG X H, CHEN L, SUN W J, et al.Research and implementation of the adaptive control method for emission current of electron ionization ion source[J]. International Journal of Mass Spectrometry, 2023, 485: 116994.
[43] WANG X H, CHENG Y J, CHEN L, et al.Development of a high-voltage radio frequency power supply for quadrupole mass spectrometers with a wide dynamic measurement range[J]. Journal of Instrumentation, 2023, 18(12): T12002.
[44] DE KEYSER J, DHOOGHE F, ALTWEGG K, et al.Mass calibration of rosetta’s ROSINA/DFMS mass spectrometer[J]. International Journal of Mass Spectrometry, 2024, 504: 117304.
[45] REN X Y, PAN J, YAN M, et al.Dual-comb optomechanical spectroscopy[J]. Nature Communications, 2023, 14(1): 5037.
[46] WANG Q, WANG Z, ZHANG H, et al.Dual-comb photothermal spectroscopy[J]. Nature Communications, 2022, 13(1): 2181.
[47] KREBBERS R, LIU N, JAHROMI K E, et al.Mid-infrared supercontinuum-based Fourier transform spectroscopy for plasma analysis[J]. Scientific Reports, 2022, 12(1): 9642.
[48] LANZINGER E, JOUSTEN K, KÜHNE M. Partial pressure measurement by means of infrared laser absorption spectroscopy[J]. Vacuum, 1998, 51(1): 47-51.
[49] DAI H, FAN D, REN X Y, et al.Vacuum partial pressure measurement using low-budget dual comb system[J]. Vacuum, 2024, 224: 113105.
[50] 钱苗根. 现代表面技术[M]. 北京: 机械工业出版社, 2016.
[51] TAKEDA M, KURISU H, YAMAMOTO S, et al.Hydrogen outgassing mechanism in titanium materials[J]. Applied Surface Science, 2011, 258(4): 1405-1411.
[52] ZHOU C S, CHEN X Y, ZHANG L, et al.Deformation-induced hydrogen desorption from the surface oxide layer of 6061 aluminum alloy[J]. Journal of Alloys and Compounds, 2014, 617: 792-796.
[53] 余洁冰, 谭彪, 康玲, 等. 无氧铜表面处理在束流准直器中的应用[J]. 强激光与粒子束, 2023, 35(10): 168-172.
[54] 宋国芳, 张素平, 潘高峰, 等. 用于高真空环境材料的表面绝缘处理技术实验研究[J]. 中国原子能科学研究院年报, 2009(1): 69-70.
[55] 张海欧, 裴元吉, 王荣, 等. Al₂O₃涂层的真空吸附研究[J]. 真空科学与技术学报, 2004(3): 203-207.
[56] GARKE B, EDELMANN CHR, GÜNZEL R, et al. Modification of the outgassing rate of stainless steel surfaces by plasma immersion ion implantation[J]. Surface and Coatings Technology, 1997, 93(2): 318-326.
[57] VOROB'EV V L, BYKOV P V, KOLOTOV A A, et al. Formation of Surface Layers of Stainless Steel and Titanium Alloy by N+ Ion Implantation[J]. Physics of Metals and Metallography, 2021, 122(12): 1213-1219.
[58] 王勇, 张耀锋, 尉伟, 等. 真空管道TiN膜热出气率实验研究[J]. 真空, 2007(4): 59-61.
[59] SAITO K, INAYOSHI S, IKEDA Y, et al.TiN thin film on stainless steel for extremely high vacuum material[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1995, 13(3): 556-561.
[60] XIE W J, MENG J, LI C C, et al.Measurement on the desorption yields of ceramic and Au-coated ceramic irradiated with Bi³²+ and Xe²³+[J]. Vacuum, 2021, 194: 110636.
[61] KWON J S, JUNG H, YEO I S, et al.Outgassing characteristics of a polycarbonate core material for vacuum insulation panels[J]. Vacuum, 2011, 85(8): 839-846.
[62] JIN X G, TANIMOTO Y, UCHIYAMA T, et al.Synchrotron radiation-stimulated desorption from Pd or Pd/TiZrV coated copper tubes[J]. Vacuum, 2021, 192: 110445.
[63] LIU X H, ADAM M, HE Y, et al.Vacuum Pumping Performance Comparison of Non-Evaporable Getter Thin Films Deposited Using Argon and Krypton as Sputtering Gases[C]//Proceedings of the 2005 Particle Accelerator Conference. 2005: 2860-2862.
[64] 苏童, 艾永昌, 黄水明, 等. MEMS芯片器件用非蒸散型吸气剂的研究状况[J]. 真空科学与技术学报, 2021, 41(7): 674-682.
[65] MALYSHEV O B, VALIZADEH R, HANNAH A N.Pumping and electron-stimulated desorption properties of a dual-layer nonevaporable getter[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2016, 34: 061602.
[66] NEVSHUPA R A, ROMAN E, DE SEGOVIA J L. Contamination of vacuum environment due to gas emission stimulated by friction[J]. Tribology International, 2013, 59: 23-29.
[67] 王毅, 郭兴, 王先荣, 等. 真空紫外辐照引起的聚合物材料质量损失模型及实验验证[J]. 宇航学报, 2016, 37(2): 229-234.
[68] 谢婉露, 吴晓斌, 王魁波, 等. 一种极紫外光刻胶放气污染测试系统: CN110879198A[P].2019-11-25.
[69] LUO Y, LIN W Y, WANG K B, et al.Research on material outgassing measurement system with an in-situ calibration[J]. Mapan, 2025, 40(3): 705-715.
[70] 罗艳, 王魁波, 吴晓斌, 等. 电子致放气测试装置的研究[J]. 真空科学与技术学报, 2024, 44(3): 196-203.
[71] 罗艳, 王魁波, 吴晓斌. 不锈钢的电子轰击放气影响特性研究[J]. 真空科学与技术学报, 2025, 45(9): 742-750.
[72] DONG Z Q, LI P, YANG J C, et al.Measurements on the gas desorption yield of the oxygen-free copper irradiated with low-energy Xe¹⁰+ and O+[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2017, 870: 73-78.
[73] 罗艳, 吴晓斌, 王魁波, 等. 极紫外光刻机材料检测装置及测试方法: CN113933454A[P].2021-09-01.
[74] MALYSHEV O B, BAGLIN V, BENDER M, et al.Vacuum in Particle Accelerators: Modelling, Design and Operation of Beam Vacuum Systems[M]. Wiley - VCH Verlag GmbH & Co. KGaA, 2019.
[75] SHEN Z C, XIA Y, ZHAO C Q, et al.Degradation Mechanism of Polyimide Film Irradiated by Gamma Rays[J]. Journal of Physics: Conference Series, 2020, 1622(1): 012026.
[76] GONG Y, TANG J, YANG X L, et al.Effect of irradiation dose rates on ethylene-propylene rubber for nuclear cables[J]. Applied Surface Science, 2019, 484: 845-852.
[77] WATKINS R V, WILLIAMS E.An appraisal of glow discharge treatment of copper surfaces by the techniques of electron stimulated desorption[J]. Vacuum, 1978, 28(10): 459-465.
[78] KOLLMUS H, KRÄMER A, BENDER M, et al. Energy scaling of the ion-induced desorption yield for perpendicular collisions of Ar and U with stainless steel in the energy range of 5 and 100MeV∕u[J]. Journal of Vacuum Science & Technology A, 2009, 27(2): 245-247.
[79] VELTHAUS V, TIETZ B, TRAUTMANN C, et al.Desorption measurements of accelerator-related materials exposed to different stimuli[J]. Vacuum, 2021, 194: 110608.
[80] WANG L, ZHANG L D, WANG J H, et al.The effect of electron irradiation and post-irradiation annealing on α-Al₂O₃ coating prepared by MOD method[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2017, 406: 600-605.
[81] MAHNER E.Review of heavy-ion induced desorption studies for particle accelerators[J]. Physical Review Special Topics - Accelerators and Beams, 2008, 11(10): 104801.
[82] MUSTAFIN E, BOINE-FRANKENHEIM O, HOFMANN I, et al.A theory of the beam loss-induced vacuum instability applied to the heavy-ion synchrotron SIS18[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2003, 510(3): 199-205.
[83] MOLVIK A W, KOLLMUS H, MAHNER E, et al.Heavy-Ion-Induced Electronic Desorption of Gas from Metals[J]. Physical Review Letters, 2007, 98(6): 064801.
[84] MAHNER E, HANSEN J, KÜCHLER D, et al. Ion-stimulated gas desorption yields of electropolished, chemically etched, and coated (Au, Ag, Pd, TiZrV) stainless steel vacuum chambers and St707 getter strips irradiated with 4.2 MeV/u lead ions[J]. Physical Review Special Topics -Accelerators and Beams, 2005, 8(5): 053201.
[85] GROSZKOWSKI J.Gas desorption at rubbing surfaces in high vacua[J]. Bull Acad Pol Sci Ser Sci Tech, 1961, 9(2): 111-112.
[86] PERESSADKO A G, NEVSHUPA R A, DEULIN E A.Mechanically stimulated outgassing from ball bearings in vacuum[J]. Vacuum, 2002, 64(3): 451-456.
[87] RUSANOV A, FONTAINE J, MARTIN J M, et al.Gas desorption during friction of amorphous carbon films[J]. Journal of Physics: Conference Series, 2008, 100(8): 082050.
[88] ISHIKAWA Y, YOSHIMURA T.Mechanically stimulated outgassing from stainless steel surface[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1991, 9(3): 2021-2024.
[89] ŘEPA P, ROTT M.Outgassing of metals stimulated by friction[J]. Vacuum, 1997, 48(7): 775-778.
[90] PU S D, TURK A, LENKA S, et al.Study of hydrogen release resulting from the transformation of austenite into martensite[J]. Materials Science and Engineering: A, 2019, 754: 628-635.
[91] WEN Y F, KOYAMA M, HOJO T, et al.Plasticity-induced Hydrogen Desorptions Associated with Hydrogen-assisted Martensitic Transformation and Deformation Twinning in Austenitic Stainless Steels[J]. ISIJ International, 2024, 64(2): 474-481.
[92] REN C Y, WANG J, YAN P, et al.Experimental study on gas desorption in surface flashover of solids in vacuum[J]. IEEE Transactions on Dielectrics and Electrical Insulation, 2013, 20(4): 1189-1194.
[93] MINATO T, KAJITA S, PANG C L, et al.Tunneling Desorption of Single Hydrogen on the Surface of Titanium Dioxide[J]. ACS Nano, 2015, 9(7): 6837-6842.
[94] KHANBEKOV I F, LI I P, PETROV V S, et al.Research of acoustically stimulated thermal desorption in electrovacuum microwave devices[J]. IOP Conference Series: Materials Science and Engineering, 2018, 387(1): 012032.
[95] BELKHIRIA S, BRIKI C, DHAOU M H, et al.A study of the magnetic properties of LaNi5 and their effect on hydrogen desorption under the action of a magnetostatic field[J]. Heliyon, 2023, 9(10): e20311.
[96] DONG S S, SHAO W Z, YANG L, et al.Surface characterization and degradation behavior of polyimide films induced by coupling irradiation treatment[J]. RSC Advances, 2018, 8(49): 28152-28160.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

Comments

Recommended 10

[1]	LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[2]	LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
[3]	HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[4]	WEI Jun、, LIU Zhi-hong, LI Bo, CHEN Xiao-li. Brazing and vacuum leak detection of large caliber alumina ceramic and stainless steel[J]. VACUUM, 2018, 55(5): 62 -65 .
[5]	ZHAO Yan-hui, SHI Wen-bo, LIU Zhong-hai, LIU Zhan-qi, YU Bao-hai. Effect of deposition process parameters on arc ion plating[J]. VACUUM, 2018, 55(6): 49 -59 .
[6]	ZHANG Fen-li, DENG Jing-lian, WANG Jie-feng, MENG Qing-yuan. Study on the pretreatment cleaning process of steel tube before coating[J]. VACUUM, 2018, 55(6): 60 -63 .
[7]	DUAN Yong-li, Deng Wen-yu, QI Li-jun, LIU Kun, SUN Bao-yu, WANG Qing. Influence of Tb grain boundary diffusion on the magnetic performance and heat resistance of sintered NdFeB magnet[J]. VACUUM, 2018, 55(6): 76 -79 .
[8]	XU Jun-qi, LI Hou-jun, LI Mian, WANG Jian, SU Jun-hong, GOLOSOV Dmitriy A.. Optical and laser damage characteristics of TiO₂ films prepared by thermal evaporation deposition technique[J]. VACUUM, 2019, 56(1): 39 -44 .
[9]	WANG Chun-ming, ZHANG Ming-da, SU Yu-ping. Discussion on leak detection method of vacuum application equipment[J]. VACUUM, 2019, 56(1): 52 -55 .
[10]	ZHU Lei, LI Jing. Harm and prevent measures for chamber pollution of gas quenching furnace[J]. VACUUM, 2019, 56(1): 59 -62 .

Advances in Research on Material Outgassing Behavior under Vacuum Environments

Abstract

Cite this article

share this article

References

Related Articles 15

Metrics

Comments

Recommended 10

[1]	DUAN Zhuoxin. Optimized Drive Control Technology for PVD Coating Vacuum Magnetron Sputtering Equipment [J]. VACUUM, 2026, 63(3): 28-35.
[2]	WANG Yuanhui, ZHOU Mingxu, LI Jianchang, YUAN Hongfeng, GONG Zhigang. Recent Development on Design and Research of Thermal Screen for Vacuum Furnace [J]. VACUUM, 2026, 63(3): 36-43.
[3]	LIU Xueting, WEI Haibo, CHEN Miao. Study on the Effects of Vacuum Sintering on the Structure and Properties of Si-Ca System Steel Slag Ceramics [J]. VACUUM, 2026, 63(3): 44-48.
[4]	SONG Jingsi, CHEN Jiuqiang, LI Xiuzhang, ZHAO Shuai, FENG Junxiao, ZUO Ye, ZHANG Zhekui. Discussion on the Macro Architecture of Large Vacuum Induction Furnaces [J]. VACUUM, 2026, 63(3): 49-55.
[5]	PAN Xin. Ultrasonic Leak Diagnosis and Vacuum-Driven In-Situ Sealing Technology in Negative Pressure Environments [J]. VACUUM, 2026, 63(3): 62-68.
[6]	GUO Wei, ZHANG Xinyue, PAN Lijuan, HOU Feng. Multi-physical Field Simulation and Design of Vacuum Circuit Breaker Interrupter for Smart Grid [J]. VACUUM, 2026, 63(3): 69-75.
[7]	ZHANG Ziqi. Optimization of Electromagnetic Compatibility of Vacuum Circuit Breaker under Transient Field Coupling [J]. VACUUM, 2026, 63(3): 76-82.
[8]	CHEN Dianlong, ZOU Shun, XV Yang, WANG Dong. Application of ZnSe Vacuum Infrared Window Material in Fastener Detection of Composite Robot Thermal Imaging Recognition System [J]. VACUUM, 2026, 63(3): 83-90.
[9]	JIA Shouya, WU Long. Design and Application of Local Vacuum Technology for Electron Beam Welding Machines [J]. VACUUM, 2026, 63(3): 91-96.
[10]	TANG Tong, ZONG Feichao, YANG Wei, GAO Xueyang. In-situ Monitoring and Attenuation Prediction Model for Vacuum Degree of Vacuum Insulation Panel and Its Application in Building Energy Saving Regulation [J]. VACUUM, 2026, 63(3): 97-103.
[11]	FU Yanjie, MIN Linfeng. Critical Load Analysis of Dynamic Instability of Valve Body for a Newly Made Three Eccentric Vacuum Butterfly Valve Under the Action of Fluid Medium [J]. VACUUM, 2026, 63(3): 104-110.
[12]	ZHANG Haotian, JIN Hai, YU Xiaoxue, WANG Jiaxiang, ZHAN Heng, LI Kunzhao, CHEN Zhou. Preparation and Characterization of Vacuum Insulated Panels With Composite Core of Poplar Wood Fiber [J]. VACUUM, 2026, 63(2): 47-54.
[13]	YOU Meiyan, ZHU Yuxin, LI Ruhang, SHEN Jinyu, BIAN Zheng, YAN Hongchi, LUO Senyun, XIE Yuanhua. Strength and Stability Analysis of Vacuum Chamber for Space Environment Simulation Equipment [J]. VACUUM, 2026, 63(2): 55-60.
[14]	LI Xiaojin, SUN Wenjun, MA Ben, DONG Meng, ZHAO Lan, PEI Xiaoqiang, LI Zhengqing, MA Fengying. A Brief Review of Vacuum Technology in EUV Lithography [J]. VACUUM, 2026, 63(2): 61-67.
[15]	XIAO Zhenhua, ZHOU Mingxu, LI Jianchang, YUAN Hongfeng, GONG Zhigang. Parameter Optimization of Heating Elements for Vacuum Sintering Furnace [J]. VACUUM, 2026, 63(2): 68-74.