欢迎访问沈阳真空杂志社 Email Alert    RSS服务

VACUUM ›› 2019, Vol. 56 ›› Issue (6): 60-63.doi: 10.13385/j.cnki.vacuum.2019.06.11

Previous Articles     Next Articles

Introduction of Nano-X and it's Application Progress

DING Sun-an, YANG Hui   

  1. Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science, Suzhou 215123, China
  • Received:2019-08-26 Online:2019-11-25 Published:2019-12-03

Abstract: After entering the nano era, the properties of nano-materials and nano-devices are not only determined by the properties of bulk materials, but also by the properties of material′s surface and interface. In order to avoid ucontrollable changes and damages caused by surface contaminations, the thin film materials and nano-scale devices must be processed in ultra-high vacuum environment. This paper introduces the necessity, functions and applications of Nano-X.

Key words: nano, surface contamination, vacuum environment, Nano-X, important progress

CLC Number: 

  • TB753+.3
[1] Wang X L, Zhao Y F, Huang R, et al. Thermal stability study of GaP/High-k dielectrics interfaces[J/OL]. Advanced Materials Interface, 2017, 4(20). [2017-10-23]. https://doi.org/10.1002/admi.201700609.
[2] Meng C X, Li Y F, Wu H, et al.Structural transformation of h-BN overlayers on Pt(111) in oxidative atmospheres[J]. Phys. Chem. Chem. Phys., 2018, (20): 11013-11020.
[3] 赵新飞,陈浩,吴睿,等. 氧化锌有序结构在Au(111)和Cu(111)上的生长(英文)[J]. 物理化学学报,2018,12:1379-1380.
[4] Chen Q, Ye F Y, Lai Y Q, et al.Energy band alignment in operando inverted structure P3HT:PCBM organic solar cells[J]. Nano Energy, 2017,40: 454-461.
[5] Cui Y, Pan Y, Meyer T, et al.Formation of Magic Isophorone Islands on Au(111): Interplay between Dipole Interactions and Hydrogen Bonding[J]. J. Phys. Chem. C., 2017, 121(8): 4318-4323.
[6] Zhang Z L, Li W Y, Fu K, et al[J]. IEEE Electron Devices Letters, 2017, 38(2): 236-239.
[7] Zhong Y Z, Zhou Y, Gao H W,et al.Self-terminated etching of GaN with a high selectivity over AlGaN under inductively coupled Cl2/N2/O2 plasma with a low-energy ion bombardment[J]. Applied Surface Science, 2017,420: 817-824.
[8] Xu Q Q, Zhao J W, Pecunia V, et al.Selective Conversion from p-Type to n-Type of Printed Bottom-Gate Carbon Nanotube Thin-Film Transistors and Application in Complementary Metal-Oxide-Semiconductor Inverters[J]. ACS Appl. Mater. Interfaces, 2017, 9(14): 12750-12758.
[9] Hu J X, Xu J B, Zhao Y F, et al. Roles of Oxygen and Hydrogen in Crystal Orientation Transition of Copper Foils for High-Quality Graphene Growth[J/OL]. Scientific Report, 2017, 7:45358[2017-04-03].https://www.nature.com/articles/srep45358.
[1] HE Jian-feng, HUANG Wei-jun, DONG Chang-kun. A New Carbon Nanotube Field Emission Ionization Gauge With Coaxial Electrodes [J]. VACUUM, 2019, 56(6): 12-15.
[2] PENG Run-ling, YIN Sha-sha, WEI Yan, LIU De-rong, WANG Ning. Preparation of Inorganic Nanopowders by Vacuum Freeze-drying [J]. VACUUM, 2019, 56(5): 77-84.
[3] LI Jian, TONG Hong-hui, DAN Min, JIN Fan-ya, WANG Kun, CHEN Lun-jiang. Applications and research progress of field emission electron sources [J]. VACUUM, 2019, 56(3): 27-31.
[4] YIN Sha-sha, PENG Run-ling, WEI Yan, CAO Wei, WANG Ning. Preparation of nano-MoS2 powders by vacuum freeze-drying [J]. VACUUM, 2018, 55(6): 80-83.
[5] YAO Ting-ting, ZHONG Zhao-jin, LI Gang, TANG Yong-kang, YANG Yong, JIN Ke-wu, SHENG Hong-xue, WANG Tian-qi, PENG Saiao, JIN Liang-mao, SHEN Hong-lie, GAN Zhi-ping, MA Li-yun. Study on fabrication and properties of micro-nano structure AZO films by DC coupled RF sputtering [J]. VACUUM, 2018, 55(6): 64-67.
[6] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters [J]. VACUUM, 2018, 55(5): 1-9.
[7] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique [J]. VACUUM, 2018, 55(5): 10-14.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
[1] LI De-tian, CHENG Yong-jun, ZHANG Hu-zhong, SUN Wen-jun, WANG Yong-jun, SUN Jian, LI Gang, . Preparations and applications of carbon nanotube field emitters[J]. VACUUM, 2018, 55(5): 1 -9 .
[2] ZHOU Bin-bin, ZHANG jian, HE Jian-feng, DONG Chang-kun. Carbon nanotube field emission cathode based on direct growth technique[J]. VACUUM, 2018, 55(5): 10 -14 .
[3] LI Zhi-sheng. Development of ultra large shielded door for infrared calibration in simulated space environment[J]. VACUUM, 2018, 55(5): 66 -70 .
[4] ZHENG Lie, LI Hong. Design of 200kV/2mA continuous adjustable DC high voltage generator[J]. VACUUM, 2018, 55(6): 10 -13 .
[5] CHAI Xiao-tong, WANG Liang, WANG Yong-qing, LIU Ming-kun, LIU Xing-zhou, GAN Shu-yi. Operating parameter data acquisition system for single vacuum pump based on STM32F103 microcomputer[J]. VACUUM, 2018, 55(5): 15 -18 .
[6] SUN Li-zhi, YAN Rong-xin, LI Tian-ye, JIA Rui-jin, LI Zheng, SUN Li-chen, WANG Yong, WANG Jian, . Research on distributing law of Xenon in big accumulation chamber[J]. VACUUM, 2018, 55(5): 38 -41 .
[7] HUANG Si, WANG Xue-qian, MO Yu-shi, ZHANG Zhan-fa, YING Bing. Experimental study on similarity law of liquid ring compressor performances[J]. VACUUM, 2018, 55(5): 42 -45 .
[8] JI Ming, SUN Liang, YANG Min-bo. Design of automatic sealing and locking scheme for lunar sample[J]. VACUUM, 2018, 55(6): 24 -27 .
[9] LI Min-jiu, XIONG Tao, JIANG Ya-lan, HE Yan-bin, CHEN Qing-chuan. 20kV high voltage based on double transistor forward converter pulse power supply for metal deburring[J]. VACUUM, 2018, 55(5): 19 -24 .
[10] LIU Yan-wen, MENG Xian-zhan, TIAN Hong, LI Fen, SHI Wen-qi, ZHU Hong, GU Bing. Test of ultra high vacuum in space traveling-wave tube[J]. VACUUM, 2018, 55(5): 25 -28 .
辽ICP备06004570号-4
Copyright © VACUUM, All Rights Reserved.
Tel: （024）24134406 24110136 24121929　Fax: （024） 24121929　E-mail: zkzk1964@126.com
Powered by Beijing Magtech Co. Ltd