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VACUUM ›› 2020, Vol. 57 ›› Issue (1): 94-96.doi: 10.13385/j.cnki.vacuum.2020.01.17

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  • Online:2020-01-25 Published:2020-03-17

CLC Number: 

  • O484
[1] WU Hou-pu, TIAN Qin-wen, TIAN Xiu-bo, GONG Chun-zhi. Development and Discharge Behavior of Novel Double Bipolar Pulse High Power Impulse Magnetron Sputtering System [J]. VACUUM, 2019, 56(6): 1-6.
[2] . [J]. VACUUM, 2019, 56(6): 85-86.
[3] LI Hao, WANG Dong-wei, ZHANG Chuan, LIU Chan, HUANG Mei-dong. Study on corrosion-resistance of Cr/CrN multilayers by arc ion plating [J]. VACUUM, 2019, 56(3): 21-26.
[4] . [J]. VACUUM, 2019, 56(3): 78-80.
[5] ZHAO Yun, MU Jia-li, LI Ming-hua, LI Wen-long, YAO Chun-long. Research on improvement of film surface defects of reflectors based on QFD and DOE [J]. VACUUM, 2019, 56(3): 32-36.
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[7] . [J]. VACUUM, 2019, 56(2): 78-80.
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[10] WANG Xiao-ran, MA Yan-bin, DUAN Ping, LI Ru-yong, ZHUANG Bi-hui, CUI Min, YUAN An-juan, DENG Jin-xiang. Effect of Mg doping concentration on Ga2O3 thin films prepared by RF magnetron sputtering [J]. VACUUM, 2018, 55(6): 68-72.
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