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VACUUM ›› 2019, Vol. 56 ›› Issue (3): 32-36.doi: 10.13385/j.cnki.vacuum.2019.03.07

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Research on improvement of film surface defects of reflectors based on QFD and DOE

ZHAO Yun, MU Jia-li, LI Ming-hua, LI Wen-long, YAO Chun-long   

  1. Shenyang Academy of Instrumentation Science Co., Ltd, Shenyang 110043,China
  • Received:2018-03-30 Published:2019-06-26

Abstract: In this paper, the optical reflector was chosen as the research object. The customer requirements on the optical reflector film quality and the quality flaw producted in production process were obtained by QFD. Combined with the optical mirror coating process, the demand in the form of quality house was transformed to process factors that affect the film surface defects of plating process for thin films. The design of key process factors and test process were optimization by using DOE test method. The results were analyzed by means of test and the range analysis method. The optimal combination of process parameters was thus obtained to prevent film surface defects. The experimental results show that the integrated improved model of QFD and DOE can achieve good practical application effect in the surface performance of reflector film.

Key words: quality function deployment, design of experiment, reflector, film quality

CLC Number: 

  • O484.4
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