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VACUUM ›› 2020, Vol. 57 ›› Issue (3): 54-60.doi: 10.13385/j.cnki.vacuum.2020.03.12

• Vacuum Acquisition System • Previous Articles     Next Articles

Analytical Calculation, Experimental Studies on Gas Thermodynamic Processes in Screw Vacuum Pump

ZHAI Yun-fei1, ZHANG Shi-wei1, SUN Kun1, ZHAO Fan1, ZHANG Zhi-jun1, HAN Jin1, ZHANG Li2, ZHANG Yong-ju2   

  1. 1. School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China;
    2. College of Aeronautical Engineering, Taizhou University, Taizhou 318000, China
  • Received:2019-10-21 Published:2020-06-18

Abstract: This paper presents a simplified model describing the distribution of leakage among working chambers in the screw vacuum pump. Based on the model, the gas thermodynamic processes in the screw vacuum pump is analyzed in depth. The thermodynamic parameters of each processes, including sucking process, compressing process, transferring process, backlashing process and exhausting process, which vary with the time are derived. At the same time, a special experimental test bench is set up, and multi-stage gradational screw rotors are adopted, and five pressure test holes on the side of the pump cavity are produced. The actual tests are carried out under the ultimate vacuum condition of the screw vacuum pump. They indirectly verify the correctness of the leakage model and thermodynamic calculations.

Key words: screw vacuum pump, thermodynamic processes, leakage

CLC Number: 

  • TB752+.2
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