|
Treatment of Inner Surface of Guide Sleeve with Inner Diameter of20mm: Discharge Characteristics of Mixed Gas Hollow Cathode
MA Yu-shan, CHANG Zhan-dong, LIU Hai-bo, JIA Hua, YUE Ling, XU Xi-long, GONG Chun-zhi, Tian Xiubo
VACUUM. 2020, 57 (3):
37-41.
DOI: 10.13385/j.cnki.vacuum.2020.03.09
Aiming at the DLC treatment of inner surface of 20mm guide sleeve of high-end valve, the effects of pulse voltage, pulse width, frequency and working pressure on the volt-ampere characteristics of hollow cathode discharge in tube under argon and mixed atmosphere were studied by using high frequency and high voltage pulse power supply. The results show that the hollow cathode discharge is realized in the five axially aligned tubes. The discharge current under argon condition shows obvious characteristics of hollow cathode discharge, while the current amplitude under mixed gas condition is relatively flat. The increase of pulse voltage or pressure is beneficial to the increase of discharge current, while the increase of pulse frequency decreases the peak current slightly, and the increase of pulse width increases the peak current gradually under the pure argon condition, but has little effect on the peak current under other mixed conditions, only increases the average current. Under fixed pressure of 10 Pa, the change of acetylene flow rate has little effect on discharge current, which is beneficial to enlarge the process window range of DLC film deposition. The above results may provide a technological basis for the preparation of DLC film on inner wall of small diameter guide sleeve of high-end valves.
References |
Related Articles |
Metrics
|