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VACUUM ›› 2020, Vol. 57 ›› Issue (3): 49-53.doi: 10.13385/j.cnki.vacuum.2020.03.11

• Measurement and Control • Previous Articles     Next Articles

Research on Control System of Electro-servo Driven of Vacuum Diffusion Welding

ZHANG Ji-feng, TANG Rong   

  1. Beijing Vacuum Electronics Research Institute, Beijing 100015, China
  • Received:2019-04-07 Published:2020-06-18

Abstract: With the development of military vacuum electronic tubes toward miniaturization and high frequency bands, traditional vacuum diffusion welding is unable to meet the high quality of parts welding needs. After comparing several pressure loading methods, the electric-servo control system is chosen. This paper introduces the design points of the electric-servo control system, and analyzes and evaluates the test data. Compared with the traditional equipment, the electric-servo system has the advantages of high precision, high flexibility, and high precision welding.

Key words: vacuum diffusion welding, electro-servo, closed loop control

CLC Number: 

  • TP273
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