复合分子泵涡轮级参数对氦质谱检漏仪性能的影响研究*

doi:10.13385/j.cnki.vacuum.2022.04.01

Abstract

Abstract: As an important component of the helium mass spectrometer leak detector, the geometric parameters of the composite molecular pump not only affect the pumping performance, but also affect the detection performance of the leak detector. Based on the basic theory of molecular pump pumping, this paper establishes the calculation model of composite molecular pump turbine stage. By changing the blade inclination, blade number, blade height and blade thickness, the pumping performance of composite molecular pump turbine stage to air and helium was calculated respectively, and the influence of composite molecular pump turbine stage parameters on the detection performance of helium mass spectrometer leak detector was studied. The results show that reducing the blade inclination, increasing the number of blades, the blade height and blade thickness are conducive to the improvement of the detection sensitivity of the helium mass spectrometer. Considering the pumping performance of molecular pump and the detection sensitivity of helium mass spectrometer, the optimal blade inclination is 25°, the number of turbine blades is between 25 and 30, the blade height is 3 mm, and the blade thickness is 0.6 mm to 0.8 mm.

Key words: compound molecular pump, turbine stage, blade parameter, helium mass spectrometer leak detector, detection sensitivity

CLC Number:

TB752

LI Bo, HOU De-feng, WANG Xiao-dong, BA De-chun. Influence of Turbine Stage Parameters of Composite Molecular Pump on the Performance of Helium Mass Spectrometer Leak Detector[J].VACUUM, 2022, 59(4): 1-7.

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Influence of Turbine Stage Parameters of Composite Molecular Pump on the Performance of Helium Mass Spectrometer Leak Detector

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