VACUUM ›› 2022, Vol. 59 ›› Issue (4): 56-63.doi: 10.13385/j.cnki.vacuum.2022.04.11
• Thin Film • Previous Articles Next Articles
WANG Li-zhe1,2, CAI Yan1,2, ZHNG Ru-jing1,2, HE Li-min1,2, MU Ren-de1,2
CLC Number:
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