VACUUM ›› 2021, Vol. 58 ›› Issue (4): 12-20.doi: 10.13385/j.cnki.vacuum.2021.04.03
• Thin Film • Previous Articles Next Articles
BAI Ming-yuan, WANG Xin, ZHEN Zhen, MU Ren-de, HE Li-min, XU Zhen-hua
CLC Number:
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