VACUUM ›› 2024, Vol. 61 ›› Issue (3): 63-69.doi: 10.13385/j.cnki.vacuum.2024.03.11
• Thin Film • Previous Articles Next Articles
LIU Yu-zhuo, WANG Xin, LI Na, ZHEN Zhen, XU Zhen-hua
CLC Number: TB31
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