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VACUUM ›› 2026, Vol. 63 ›› Issue (1): 9-14.doi: 10.13385/j.cnki.vacuum.2026.01.02

• Thin Film • Previous Articles     Next Articles

Development of Medium Wave Infrared Narrowband Filter for CO2 Gas Analysis

YU Zhiqiang, WANG Zhonglian, REN Shaopeng, LOU Haiyu, LIN Xiaomin, LI Bing, LIU Weihang, YANG Zhaoxiang, CHENG Jiaxiang   

  1. Shenyang Academy of Science Co., Ltd., Shenyang 110043, China
  • Received:2025-03-04 Online:2026-01-25 Published:2026-02-02

Abstract: ： To improve the precision and sensitivity of CO2 gas detection in the mid-wave infrared, a high-performance mid-wave infrared narrowband filter was developed. The blue sapphire was used as the substrate material, and Ge and ZnS materials were used to construct the film layer. The film system structure was optimized by the equivalent impedance matching design method. At the same time, the sensitive layer segmentation control technology and the proportional factor differential control of the film thickness were introduced to effectively solve the high-precision control problem in the infrared waveband. The test results show that the final product has a center wavelength of 4 269 nm, a peak transmission rate of 89.7%, a passband half-width of 126 nm, and an average cutoff depth of OD2.83 from 2-15 μm. The as-developed infrared narrowband filter can effectively improve the detection accuracy of gases and provide strong support for the progress of gas detection technology.

Key words: optical thin film, medium wave infrared, narrowband filter, CO2, gas detector

CLC Number:  O484

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