Plasma smelting has a series of features which can accelerate heat transfer, material exchange and chemical reaction processes, thus strengthening smelting process. It can be used together with other smelting methods to form plasma electroslag process, plasma induction remelting process, etc. It has an irreplaceable role in the smelting of refractory metals, the cultivation of refractory metal single crystals, the refining of active metals, and the recycling of precious metals.

This paper introduces the design principle and development process of the first multi-chamber continuous vacuum sintering furnace in China. It introduces its application background, system composition and working principle of each main unit, and develops and designs a set of production equipment with its own characteristics according to relevant technical requirements.

In this paper, the principle, characteristics, classification and application of diffusion pump are briefly described. The historical process of the domestic diffusion pump development is reviewed. The actual level and present condition of the diffusion pump are analyzed. The future development prospect of the diffusion pump is discussed.

The proton accelerator at China Spallation Neutron Source (CSNS) consists of the negative hydrogen ion (H^-) Linac with an energy of 80 MeV, the Linac to Rapid Cycling Synchrotron (RCS) Beam Transport (LRBT) and RCS to Target Beam Transport (RTBT), and the RCS that accumulates and accelerates the proton beam to 1.6 GeV. The LRBT section with a total length about 200 meters is an important part for the accelerator. This paper introduce the LRBT vacuum system including vacuum layout design, physical requirements, vacuum parameters, key equipments, installation and commissioning work. At present, the dynamic vacuum of LRBT is better than 2×10^-6 Pa when the target power is 50kW, meeting the physical requirements. The vacuum equipments are stable and reliable without failure in the past two and a half years of long-term operation includes each vacuum non-standard equipment, vacuum acquisition and measuring equipment, etc.

A high pressure cryogenic liquid oxygen pipeline is the key technology in the research phase of XX engine and appearance stage. It provides a protection system for high pressure liquid oxygen medium for a certain type of engine. In this line, there are 4 compensators under high pressure. During a room temperature air tightness test of the system, 4 corrugated pipe appear bending failure situation to some different degrees. For such cases, to ensure the test schedule and the safety of the system, the bellows failure is found, and propose remedial measures are taken.

A steam ejecter refrigeration cycle system consisting of an ejector, an evaporator, a generator, and a condenser was established. The effects of different constant diameters of the diffuser on the pumping performance of the ejector were investigated. When the throat diameter of the diffuser is increased from 24 mm to 28 mm, the entrainment ratio of the ejector is significantly increased, the pumping efficiency is improved, but the critical back pressure of the ejector is reduced. The effect of the constant diameter of the diffuser on the pumping performance of the ejector under different operating parameters was also analyzed. The results show that with the increase of working steam pressure, the entrainment ratio increases first and then decreases. When the pressure reaches 0.36MPa, the maximum entrainment ratio of the ejector is 0.53. The entrainment ratio remains constant when the back pressure is less than the critical back pressure. When the back pressure is greater than the critical back pressure, the entrainment ratio is reduced to zero until the back pressure is 7000Pa. There is an optimum constant diameter of diffuser to maximize the ejector pumping efficiency under certain operating parameters. In actual design and production, it is necessary to take into account both the exhaust efficiency and the ultimate exhaust capacity of the ejector.

The reliability of the motion mechanism for automatic door is the key factor for usability of vacuum equipment. Aiming at the motion mechanism for new type of automatic door, based on the FMEA, the failure tree model of motion mechanism was established and the minimal cut set was analyzed. The fault tree was analyzed qualitatively and quantitatively. The weak links affecting the system reliability were found out and the suggestions were proposed in this paper.

As a basic equipment for the high-quality utilization of biomass energy, the design of dust suppression structure plays a critical role in the safe and environment friendly operation of straw pulverizer. In this study, a new type of pulverizer with variable diameter was designed. In this pulverizer, the rotating rotor blade and shell with variable diameter help to produce a low pressure zone, resulting in an inward pressure difference at the inlet. Therefore, the escape resistance of the particles is increased and the dust is suppressed. Firstly, the pressure difference of the particle escape from diameter-variable pulverizer was obtained by theoretical analysis. Secondly, the MRF (moving reference frame) method and the DPM (discrete phase model) were used to simulate the gas-solid two-phase flow in the pulverizer. The results show that the number of the particles escaping from inlet in diameter-variable pulverizer is reduced about 30% compared with that of the previous pulverizer, which means the dust suppression effect is remarkable. Then, the working parameters of pulverizer with variable diameter were further optimized and analyzed within a rotating speed range of （500~6000）r/min, particle size of （1~5000）μm, and the variable diameter ratio of 1~1.2. Finally, the optimized pulverizer with dust suppression performance of 57% improved is obtained. This work provides a theoretical basis for the structure design as well as safe and environment friendly operation of straw pulverizer.

The chamber C1 of Low-E glass coating line is a very important vacuum chamber for the whole production line. Its cycle time determines the fastest cycle time that the whole glass coating line can achieve. This paper puts forward a series of requirements for the design of the chamber C1, and gives the corresponding design principles. Starting from the direction of reducing equipment manufacturing cost, reducing energy consumption and increasing the applicability of equipment, it also gives the direction different from the conventional design. In the special design, the pumping time and pump group parameters are calculated. The C1 chamber was designed and manufactured according to this design. We tested a series of parameters and the special design of the occupying block changed the pumping time by 43.2%, which has been proved.

HfO₂ thin films were prepared on Si and quartz wafers by magnetron sputtering. SEM, XRD, XPS, UV-visible spectrophotometer and HP4284A precision LCR tester were used to study the surface morphology, microstructure, composition, optical properties and electrical properties of HfO₂ thin film. The main conclusions were as followsthe surface of HfO₂ thin film prepared by magnetron sputtering method is flat and dense with uniform grain size. The grain size is mostly between 10nm~20 nm. The thin film has a polycrystalline structure and a monoclinic crystal structure. The atomic ratio of O and Hf approached 21, and the atomic ratio of O and Hf increased with increase of the ratio of argon to oxygen. The transmittance is above 85% in the wavelength range of 400nm-800 nm, and the refractive index is above 2.0. The thin film has a small leakage current and a dielectric constant of 16 or more. High dielectric HfO₂ material is suitable to replace traditional SiO₂ as gate dielectric material.

In this article, we reported a new PE-ALD method for depositing cobalt carbide thin films. The cobalt carbide film was successfully prepared under the used of Co(amd)₂ as precursor and H₂ plasma as the reactant. The relationship between film thickness and deposition cycle showed an ideal layer-by-layer film growth behavior with a saturated film growth rate of 0.66 nm/cycle at 100℃. The as-deposited films were characterized by XRD and TEM, which illustrated the films were polycrystalline hexagonal Co₃C crystal structures. The XPS indicated a high purity deposited cobalt carbide film. This PE-ALD process could deposit a pure, smooth and highly conformal cobalt carbide thin film in trench with 201 aspect ratio, which can be beneficial to coating on complex high-aspect-ratio 3D structures with potential applications in microelectronics and catalytic fields.

In this paper, nickel chromium silicon thin film was deposited on 96 alumina substrate by DC magnetron sputtering method, and then the resistance patterns of different requirements are realized bylithography and wet etching. In the graphic process, to comparethe etching effects of HNA etching system, TMAH etching system and catalytic oxidation etching system , and then choice the best etching system and optimizethe process parameters. In the catalytic oxidation etching system (CNAHNO₃H₂O) with CNA content of 30% etching temperature 50℃, the etching rate of about 4 nm/s, etching effect is best, and the design dimension deviation is small, which can realize nickel chromium silicon thin film etching line width to （15±1）μm, meet the requirements of the design and production of high precision precision membrane resistance.

This article introduces the preparation method and development state of flexible coating materials and their applications, as well as the application and development trend of flexible coating materials in the flexible circuit board industry, mainly describes the development and preparation of high performance flexible circuit board materials by magnetron sputtering.

Due to the lack of uniform specifications, how to use alcohol to efficiently and quickly determine the leak point has always been a key concern for vacuum coating companies. In this paper, the effectiveness of the alcohol spray leak detection in vacuum coating equipment is studied, and the cesium mass spectrometer leak detection is used for verification and calibration. The three main influencing factors including air pressure working range, pumping rate and leak point structure are systematically studied. The following conclusions, the alcohol-based leak detection and helium mass spectrometry leak detection of vacuum coating equipment were studied. It was mainly found that, in the 1.0×10^-1Pa~9.9×10^-1Pa pressure range due to the large size of the leak point, after the alcohol is sprayed, the air pressure rises directly and then falls. However, in the air pressure range of 5.0×10^-3Pa~9.9×10^-2Pa, the air pressure trend of alcohol leakage detection is firstly decreased, then increased and then decreased. When the air pressure is lower than 5.0×10^-3Pa, the alcohol leak detection cannot detect the leak point. At different pump speeds, compared with the operation of two molecular pumps, the alcohol and helium mass spectrometer leak detectors have a long waiting time and are prone to miss detection when a molecular pump is working for leak detection. In the case of alcohol leak detection, the complex leaky point pressure reaction takes longer than the simple structure leak point. The above research results provide effective guidance for vacuum production and application units using alcohol efficient and easy leak detection.

Based on the Fabry-Perot filter structure, a preliminary three-channel filter structure is designed theoretically by optimizing the interference of the space layer. In order to further reduce the channel half-bandwidth and improve the filtering property, the reflectivity of reflective film can be improved appropriately. Finally, a three-channel filter with half-bandwidth of less than 5 nm and peak transmittance of more than 95% was designed.

Vacuum freeze-drying (referred to as freeze-drying ) is carried out at low temperature and low pressure. The as-prepared powder has less hard agglomeration, small and uniform particle size, which has been developed as an important method for preparing inorganic nanopowders. This review summarizes the latest advance and techniques in preparation of inorganic nanopowders by freeze-drying method. The main problems and development directions in this area are discussed.