射频功率对DLC薄膜结构和力学性能的影响

doi:10.13385/j.cnki.vacuum.2019.04.08

真空 ›› 2019, Vol. 56 ›› Issue (4): 34-36.doi: 10.13385/j.cnki.vacuum.2019.04.08

射频功率对DLC薄膜结构和力学性能的影响

伍醒, 蒋爱华, 程勇

桂林理工大学理学院,广西桂林 541004

收稿日期:2018-07-17 发布日期:2019-08-22
通讯作者: 蒋爱华,高级实验师。
作者简介:伍醒（1994-）,男,广西壮族自治区陆川县人,本科。

Effect of RF Power on Structure and Mechanical Properties of DLC Films

WU Xing, JIANG Ai-hua, CHENG Yong

College of Science, Guilin University of Technology, Guilin 541004, China

Received:2018-07-17 Published:2019-08-22

摘要/Abstract

摘要： 使用射频磁控溅射,以高纯度碳靶材和高纯度甲烷为碳源,在不同射频功率下制备了类金刚石（DLC）薄膜。利用扫描电镜、傅里叶变换红外光谱仪和显微硬度计测试了薄膜的结构与性能。研究结果表明：制备的薄膜致密均匀,随着射频功率的增大薄膜生长速度增大,C原子含量增大;在200W功率制备的薄膜sp³含量高,其分子结构与性能也就更偏向于金刚石,薄膜维氏硬度达到1038.26 MPa。同时发现,随制备功率的增加,DLC薄膜硬度呈先增大再减小的趋势,薄膜石墨化程度增大。

关键词: DLC薄膜, 射频磁控溅射, 射频功率, 键合结构, 硬度

Abstract: Diamond-like carbon ( DLC ) films were prepared using the RF magnetron sputtering with high purity carbon targets and high purity methane as carbon sources under different RF power. The structure and properties of the films were studied by the scanning electron microscopy, Fourier transform infrared spectroscopy and micro-hardness tester. The results show that the films is dense and uniform. With increasing the RF power, the growth rate and the proportion of carbon atom in the film increase. The films prepared at 200 W have high sp³ content, and its molecular structure and properties are more towards to diamond. The Vickers hardness of the films reaches 1123.42 MPa, and it was found that the hardness of DLC films increases first and then decreases with the increasing RF power. The graphitization degree of the DLC film increased.

Key words: DLC film, RF magnetron sputtering, RF power, bonding structure, hardness

中图分类号:

TB43

伍醒, 蒋爱华, 程勇. 射频功率对DLC薄膜结构和力学性能的影响[J]. 真空, 2019, 56(4): 34-36.

WU Xing, JIANG Ai-hua, CHENG Yong. Effect of RF Power on Structure and Mechanical Properties of DLC Films[J]. VACUUM, 2019, 56(4): 34-36.

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射频功率对DLC薄膜结构和力学性能的影响

Effect of RF Power on Structure and Mechanical Properties of DLC Films

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