真空 ›› 2019, Vol. 56 ›› Issue (4): 34-36.doi: 10.13385/j.cnki.vacuum.2019.04.08
伍醒, 蒋爱华, 程勇
WU Xing, JIANG Ai-hua, CHENG Yong
摘要: 使用射频磁控溅射,以高纯度碳靶材和高纯度甲烷为碳源,在不同射频功率下制备了类金刚石(DLC)薄膜。利用扫描电镜、傅里叶变换红外光谱仪和显微硬度计测试了薄膜的结构与性能。研究结果表明:制备的薄膜致密均匀,随着射频功率的增大薄膜生长速度增大,C原子含量增大;在200W功率制备的薄膜sp3含量高,其分子结构与性能也就更偏向于金刚石,薄膜维氏硬度达到1038.26 MPa。同时发现,随制备功率的增加,DLC薄膜硬度呈先增大再减小的趋势,薄膜石墨化程度增大。
中图分类号:
[1] 陈天鹏,候立. 新型金刚石薄膜材料[J]. 材料导报,1988,01: 2-5. [2] Qi M, Xiao J R, Gong C Y, et al.Evolution of the mechanical and tribological properties of DLC thin films doped with low-concentration hafnium on 316L steel[J]., Journal of Physics D: Applied Physics, 2018,51: 025301. [3] 王俊玲,代海洋. 中频脉冲非平衡磁控溅射技术制备类金刚石膜的结构与性能[J].真空,2016,53:12-16. [4] 蒋爱华,邵红娟,杨端翠,等. 射频功率对FDLC薄膜结构及场发射性能的影响,真空科学与技术学报,2014,34: 538-542. [5] Liu Y, Guo P, He X Y.Developing transparent copper- doped diamond-like carbon films for marine antifouling applications[J]. Diamond & Related Materials,2016,69:144-151. [6] Gotzmann G, Beckmann J, Wetzel C, et al.J. Neunzehn, Electron-beam modification of DLC coatings for biomedical applications[J]. Surface & Coatings Technology, 2017,311: 248-256. [7] Robertson J, Diamond-like amorphous carbon[J]. Materials Science and Engineering R, 2002, (37):129-281. [8] Liu L, Wang T, Huang J L.Diamond-like carbon thin films with high density and low internal stress deposited by coupling DC/RF magnetron sputtering[J]. Diamond & Related Materials,2016,70:151-158 [9] 李明,宓一鸣,言智,等. 薄膜材料的制备与表征方法研究进展[J].上海工程技术大学学报, 2012,26:125-128. [10] 蒋爱华,肖剑荣,王德安. 退火对含氮氟非晶碳膜结构及光学带隙的影响[J]. 物理学报, 2008, 57(9):6013-6017. [11] Xiao J R, Jiang A H.Effect of radio frequency power on the structural and optical properties of nitrogen doping of fluorinated diamond-like carbon thin films[J], Journal of Physics D: Applied Physics, 2008, 41: 225304-22538. |
[1] | 刘婵, 王东伟, 李晓敏, 武英桐, 黄美东. 脉冲负偏压对直流磁控溅射碳膜结构和性能的影响[J]. 真空, 2019, 56(2): 69-73. |
[2] | 王晓然, 马艳彬, 段 苹, 李如永, 庄碧辉, 崔 敏, 原安娟, 邓金祥. Mg 掺杂浓度对射频磁控溅射制备 Ga2O3 薄膜性质的影响[J]. 真空, 2018, 55(6): 68-72. |
|