质谱仪定量分析微量气体D2的校准因子研究*

doi:10.13385/j.cnki.vacuum.2022.04.03

真空 ›› 2022, Vol. 59 ›› Issue (4): 12-17.doi: 10.13385/j.cnki.vacuum.2022.04.03

质谱仪定量分析微量气体D₂的校准因子研究^*

李海洋^1,2, 张占文¹, 刘梅芳¹, 栾旭¹, 史瑞廷¹, 易勇¹

1. 中国工程物理研究院激光聚变研究中心,四川绵阳 621900;
2. 西南科技大学材料科学与工程学院,四川绵阳 621000

收稿日期:2021-07-04 出版日期:2022-07-25 发布日期:2022-08-09
通讯作者: 张占文,研究员,博士。
作者简介:李海洋（1995-）,男,四川省德阳市人,硕士。
基金资助:
*环境友好能源材料国家重点实验室自主课题资助（20fksy04）; 四川省重点研发计划项目（2019YFG0432）

Study on the Calibration Factor in Quantitative Analysis of Trace Gases D₂ by Mass Spectrometer

LI Hai-yang^1,2, ZHANG Zhan-wen¹, LIU Mei-fang¹, LUAN Xu¹, SHI Rui-ting¹, YI Yong¹

1. Laser Fusion Research Center, CAEP, Mianyang 621900, China;
2. School of Materials Science and Engineering, Southwest University of Science and Technology, Mianyang 621000, China

Received:2021-07-04 Online:2022-07-25 Published:2022-08-09

摘要/Abstract

摘要： 通过在质谱仪进气管路上安装的标定腔室与真空管路,实现了对与微球内气体含量相同范围的微量气体的获取。对质谱仪定量分析微量气体时的精密度及被测量氘气的压力对D₂校准因子的影响进行了研究。结果表明：该四极质谱仪的精密度较高,不同压力下10次重复测量实验数据的相对标准偏差均小于0.004;校准后的一个月内质谱仪具有较高稳定性,其定量分析误差低于1%,准确度较高;D₂和Ar的浓度校准因子在一年内的变化不超过3%,而D₂的压力校准因子在一年内的变化超过8%;D₂的压力校准因子η与被测量氘气的压力P₁成反比,且η与logP₁存在较好的线性关系,这种线性关系在半年内具有较高的稳定性。

关键词: 四极质谱, 校准因子, 定量分析, 微球, 微量气体

Abstract: Through the calibration chamber and vacuum tube installed on the intake pipe of the mass spectrometer, the trace gas with the same content range as the gas in microsphere can be obtained. The precision of quantitative analysis of trace gases by mass spectrometer and the effect of measured deuterium pressure on the calibration factor of D₂ were studied. The results show that the precision of the quadrupole mass spectrometer is high, and the relative standard deviation of the 10 repeated measurements under different pressures is less than 0.004. The mass spectrometer has a high stability within one month after calibration, and it has a high accuracy with the quantitative analysis error is less than 1%. The concentration calibration factors for D₂ and Ar varied no more than 3% within one year, while the pressure calibration factors for D₂ varied more than 8% within one year. The pressure calibration factor η of D₂ is inversely proportional to the pressure P₁ of the measured deuterium gas, and there is a good linear relationship between η and logP₁, which has a high stability in half a year.

Key words: Science and Engineering, Southwest University of Science and Technology, Mianyang 621000, China

中图分类号:

O6-33

李海洋, 张占文, 刘梅芳, 栾旭, 史瑞廷, 易勇. 质谱仪定量分析微量气体D₂的校准因子研究^*[J]. 真空, 2022, 59(4): 12-17.

LI Hai-yang, ZHANG Zhan-wen, LIU Mei-fang, LUAN Xu, SHI Rui-ting, YI Yong. Study on the Calibration Factor in Quantitative Analysis of Trace Gases D₂ by Mass Spectrometer[J]. VACUUM, 2022, 59(4): 12-17.

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质谱仪定量分析微量气体D₂的校准因子研究^*

Study on the Calibration Factor in Quantitative Analysis of Trace Gases D₂ by Mass Spectrometer

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