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真空 ›› 2021, Vol. 58 ›› Issue (4): 6-11.doi: 10.13385/j.cnki.vacuum.2021.04.02

• 薄膜 • 上一篇    下一篇

利用遗传算法定量分析Ni/Cr多层膜俄歇深度谱*

李静1, 谭张华2, 刘星星1, 陈颖琳1, 李豪文2, 杨浩3, 王昌林2, 王江涌1, 徐从康1   

  1. 1.汕头大学理学院物理系,广东 汕头 515063;
    2.汕头大学理学院数学系,广东 汕头 515063;
    3.汕头大学理学院化学系,广东 汕头 515063
  • 收稿日期:2020-09-15 出版日期:2021-07-25 发布日期:2021-08-05
  • 通讯作者: 王江涌,教授;徐从康,教授。
  • 作者简介:李静（1999-）,女,重庆会州人,本科生。
  • 基金资助:
    *国家自然科学基金项目（11274218; 51511140420）; 广东省科技计划项目（2017A010103021）

Quantitative Analysis of AES Depth Profiles for Ni/Cr Multilayered Film by Genetic Algorithms

LI Jing1, TAN Zhang-hua2, LIU Xing-xing1, CHEN Ying-lin1, LI Hao-wen2, YANG Hao3, WANG Chang-lin2, WANG Jiang-yong1, XU Cong-kang1   

  1. 1. Department of Physics,Shantou University,Shantou 515063,China;
    2. Department of Mathematics,Shantou University,Shantou 515063,China;
    3. Department of Chemistry,Shantou University,Shantou 515063,China
  • Received:2020-09-15 Online:2021-07-25 Published:2021-08-05

摘要： 在MRI模型框架下,将遗传算法与卷积及TV-Tikhonov正则化反卷积方法结合,对Ni/Cr多层膜样品在旋转和非旋转条件下测量的俄歇（AES）深度谱进行了定量分析,确定了膜层间的界面粗糙度,重构的原始膜层结构与高分辨透射电镜测量的结果非常好的吻合。

关键词: Ni/Cr多层膜, 深度剖析定量分析, MRI模型, 遗传算法, TV-Tikhonov正则化方法, 卷积, 反卷积

Abstract: The measured AES depth profiles of Ni/Cr multilayer with rotational and stationary modes are quantified by convolution and deconvolution methods with the TV-Tikhonov and the genetic algorithms in the framework of the MRI(atomic Mixing-Roughness-Information depth)model. The interfacial roughness values are obtained accordingly and the reconstructed layer structure is well agreed with the HR-TEM measurement.

Key words: Ni/Cr multilayer film, quantification of depth profile, MRI model, genetic algorithm, TV-Tikhonov regularization method, convolution, deconvolution

中图分类号: 

  • TB303
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